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MEMS device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of MEMS device

  • US 10,639,889 B2
  • Filed: 11/14/2018
  • Issued: 05/05/2020
  • Est. Priority Date: 11/16/2017
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • a first substrate which includes a first electrode;

    a second substrate which includes a second electrode and on which the first electrode and the second electrode are disposed by being laminated between the second substrate and the first substrate;

    a third electrode which is disposed between the first substrate and the second substrate and which electrically connects the first electrode and the second electrode to each other;

    a piezoelectric element which is disposed between the first substrate and the second substrate; and

    an adhesive which adheres the first substrate and the second substrate to each other,wherein a first space which includes the first electrode, the second electrode, the third electrode, and the piezoelectric element and which is configured as a closed space which is isolated from an atmosphere by the first substrate, the second substrate, and the adhesive is disposed in a space between the first substrate and the second substrate, andwherein a second space which does not include any of the first electrode, the second electrode, the third electrode, or the piezoelectric element and which communicates with the atmosphere due to a through-hole which penetrates at least one of the first substrate and the second substrate is disposed in the space between the first substrate and the second substrate.

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