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Microelectromechanical system (MEMS) device packaging

  • US 10,640,371 B2
  • Filed: 02/08/2019
  • Issued: 05/05/2020
  • Est. Priority Date: 07/27/2016
  • Status: Active Grant
First Claim
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1. A microelectromechanical system (MEMS) device comprising:

  • a substrate;

    a cap coupled to the substrate such that the substrate and the cap cooperatively define an interior cavity, wherein one of the substrate or the cap defines a port;

    a microelectromechanical component disposed within the interior cavity; and

    a non-continuous tag coupled to the substrate and the cap, wherein the non-continuous tag is positioned at one or more discrete locations along a periphery of the cap to secure the cap to the substrate.

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