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Methods of manufacturing for MEMS switches with reduced switching voltage

  • US 10,640,373 B2
  • Filed: 09/27/2017
  • Issued: 05/05/2020
  • Est. Priority Date: 04/22/2008
  • Status: Active Grant
First Claim
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1. A method of fabricating a switch comprising:

  • forming a first cantilevered electrode operable to directly contact a second fixed electrode upon an application of a voltage to a first fixed electrode;

    forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode; and

    forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,wherein the forming the hermetically sealed volume comprises;

    forming at least one hole in a nitride liner to gain access to a sacrificial resist;

    dissolving the sacrificial resist; and

    closing the at least one hole by deposition of additional liner material, andwherein the second cantilevered electrode is fixed to the nitride liner.

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