Evaporation mask and evaporation device

• US 10,640,861 B2
• Filed: 10/12/2016
• Issued: 05/05/2020
• Est. Priority Date: 10/13/2015
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd.
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Li, Xiaohu, Sun, Zhongyuan
• Primary Examiner(s): Lee, Aiden
• Application Number:
  US15/291,528
• Publication Number:
  US 20170104186A1
• Time in Patent Office: 1,301 Days
• Field of Search: 118720-721
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/044 using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

An evaporation mask includes: shielding regions and evaporation regions arranged alternately, and a baffle at least covering the evaporation regions. The shielding regions are provided with shielding parts, and the baffle includes a plurality of evaporation sub-regions, and a plurality of openings are provided in each evaporation sub-region; the plurality of evaporation sub-regions include at least one first evaporation sub-region, and compared to rest evaporation sub-regions, a sum of areas of all openings in a unit area of the first evaporation sub-region is minimum; and the closer an evaporation sub-region to the first evaporation sub-region, the less a sum of areas of all openings in a unit area of the evaporation sub-region.

Claims

1. An evaporation mask, comprising:

shielding regions and evaporation regions arranged alternately, wherein the shielding regions are provided with shielding parts; and

a baffle at least covering the evaporation regions,

wherein the baffle includes a plurality of evaporation sub-regions, and a plurality of openings are provided in each evaporation sub-region;

each of the plurality of evaporation sub-regions has an aperture ratio, and the aperture ratio is a ratio of an area of the opening in the evaporation sub-region to an area of the evaporation sub-region;

the plurality of evaporation sub-regions include at least one first evaporation sub-region, and compared to other evaporation sub-regions, the at least one first evaporation sub-region has a smallest aperture ratio;

the closer an evaporation sub-region to the at least one first evaporation sub-region, the smaller the aperture ratio of the evaporation sub-region;

the baffle is fixed to the shielding parts through support, so that there is a gap between the baffle and the shielding parts; and

the baffle is closer to an evaporation source than the shielding parts and the supports.

2. The evaporation mask according to claim 1, wherein the at least one first evaporation sub-region is circular and is located at a center position of the evaporation regions;

the other evaporation sub-regions are annular and concentric with the at least one first evaporation sub-region, and surround the at least one first evaporation sub-region; and

areas of the other evaporation sub-regions sequentially farther away from the at least one first evaporation sub-region sequentially increase.

3. The evaporation mask according to claim 1, wherein a height of the supports is in a range from 15 cm to 30 cm.

4. The evaporation mask according to claim 1, wherein an aperture of the openings in the at least one first evaporation sub-region is in a range from 4.5 mm to 6.5 mm.

5. The evaporation mask according to claim 1, wherein an aperture of the openings in the other evaporation sub-regions is in a range from 9.5 mm to 10.5 mm.

6. The evaporation mask according to claim 1, wherein a thickness of the baffle is in a range from 1.5 mm to 3.5 mm.

7. The evaporation mask according to claim 1, wherein, a material forming the baffle is a resin material or a metal material, and a tolerable temperature of the resin material or the metal material is greater than or equal to 200°

C.

8. The evaporation mask according to claim 1, wherein the supports comprise telescopic rods configured to adjust a height of the supports.

9. The evaporation mask according to claim 1, wherein a number of the baffle is plural, and each of the baffles covers one of the evaporation regions.

10. The evaporation mask according to claim 1, wherein a number of the baffle is single, and the evaporation regions are covered by the single baffle.

11. An evaporation device, comprising the evaporation mask according to claim 1.

12. The evaporating device according to claim 11, further comprising an evaporation source, wherein, compared to the shielding parts, the baffle is closer to the evaporation source.