Heat treatment system, heat treatment method, and program
First Claim
1. A heat treatment system comprising:
- a heater configured to heat an inside of a processing chamber in which a workpiece is accommodated; and
a controller that performs an overall control of the heat treatment system,wherein the controller is configured to;
store a recipe according to heat treatment content, including a temperature in the processing chamber heated by the heater;
store a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a corresponding change in film thickness resulting from the change of the temperature;
calculate a film thickness by converting inputted target information with respect to an in-plane shape of a film to be formed on the workpiece, prior to forming the film on the workpiece and prior to receiving a measured film thickness;
form the film on the workpiece by reading the stored recipe;
receive the measured film thickness of the film formed on the workpiece; and
calculate an optimum temperature that results in the inputted target information, based on the stored heat treatment change model when the measured film thickness does not fall within an allowable range relative to the inputted target information.
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Accused Products
Abstract
A heat treatment system includes a heating unit that heats an inside of a processing chamber in which a plurality of workpieces are accommodated; a heat treatment condition storing unit that stores a heat treatment condition; a heat treatment change model storing unit that stores a heat treatment change model; a heat treatment performing unit that performs the heat treatment condition; a heat treatment result receiving unit that receives a result of heat treatment performed; and an optimum temperature calculating unit that calculate a target heat treatment result for an in-plane shape of the workpiece based on a target heat treatment result and information about a shape of the target heat treatment result, and calculate an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result and the heat treatment change model.
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Citations
10 Claims
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1. A heat treatment system comprising:
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a heater configured to heat an inside of a processing chamber in which a workpiece is accommodated; and a controller that performs an overall control of the heat treatment system, wherein the controller is configured to; store a recipe according to heat treatment content, including a temperature in the processing chamber heated by the heater; store a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a corresponding change in film thickness resulting from the change of the temperature; calculate a film thickness by converting inputted target information with respect to an in-plane shape of a film to be formed on the workpiece, prior to forming the film on the workpiece and prior to receiving a measured film thickness; form the film on the workpiece by reading the stored recipe; receive the measured film thickness of the film formed on the workpiece; and calculate an optimum temperature that results in the inputted target information, based on the stored heat treatment change model when the measured film thickness does not fall within an allowable range relative to the inputted target information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification