Probe system for measuring at least one measurement object in optical and tactile fashion

• US 10,641,602 B2
• Filed: 10/11/2018
• Issued: 05/05/2020
• Est. Priority Date: 10/11/2017
• Status: Active Grant

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Ruck, Otto, Hoecherl, David
• Primary Examiner(s): Ahmed, Jamil
• Application Number:
  US16/157,761
• Publication Number:
  US 20190107383A1
• Time in Patent Office: 572 Days
• CPC Class Codes: G01B 11/007 feeler heads therefor
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor
• CPC Class Codes: G01B 9/04 Measuring microscopes
• CPC Class Codes: G02B 21/361 Optical details, e.g. image relay to the camera or image sensor G02B21/364 takes precedence; illumination details G02B21/06 and subgroups

Abstract

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.

Claims

1. A probe system for measuring at least one measurement object in an optical and tactile fashion, the probe system comprising:

at least one tactile sensor, wherein the at least one tactile sensor includes at least one tactile probe element, wherein the at least one tactile probe element has a sensor surface, wherein the at least one tactile probe element is configured to probe the at least one measurement object in tactile fashion at at least one probing point on the sensor surface;

at least one microscope camera, wherein the at least one microscope camera has at least one illumination device configured to produce an illumination light beam, wherein the at least one microscope camera includes at least one microscope optical unit configured to focus the illumination light beam in the at least one probing point and to produce at least one magnified image of the at least one measurement object in an image plane, wherein the at least one microscope camera includes at least one image capture device configured to record a magnified image, and wherein the at least one microscope camera is at least partly arranged in the at least one tactile probe element.

2. The probe system according to claim 1, wherein the at least one tactile probe element includes at least one probing element, and wherein the at least one probing element includes at least one probe ball.

3. The probe system according to claim 2, wherein the at least one probe ball is configured as a hemisphere which has a mirrored plane face.

4. The probe system according to claim 2, wherein the at least one probing element is made of an at least partly transparent material, and wherein the at least one probing element includes an industrial ruby ball or an industrial sapphire ball.

5. The probe system according to claim 3, wherein the at least one probing element is made of an at least partly transparent material, and wherein the at least one probing element includes an industrial ruby ball or an industrial sapphire ball.

6. The probe system according to claim 2, wherein the at least one tactile probe element includes at least one shaft at which the at least one probing element is arranged, wherein a face of the at least one probing element directed towards the at least one microscope camera has at least in part a plane shape that prevents a lens effect to arise in a transition from the at least one shaft to the at least one probing element.

7. The probe system according to claim 3, wherein the at least one tactile probe element includes at least one shaft at which the at least one probing element is arranged, wherein a face of the at least one probing element directed towards the at least one microscope camera has at least in part a plane shape that prevents a lens effect to arise in a transition from the at least one shaft to the at least one probing element.

8. The probe system according to claim 4, wherein the at least one tactile probe element includes at least one shaft at which the at least one probing element is arranged, wherein a face of the at least one probing element directed towards the at least one microscope camera has at least in part a plane shape that prevents a lens effect to arise in a transition from the at least one shaft to the at least one probing element.

9. The probe system according to claim 1, wherein the at least one tactile sensor includes at least one light guide.

10. The probe system according to claim 4, further including at least one optical funnel.

11. The probe system according to claim 6, further including at least one optical funnel.

12. The probe system according to claim 9, further including at least one optical funnel.

13. The probe system according to claim 1, wherein the at least one microscope camera includes at least one interface.

14. The probe system according to claim 13, wherein the at least one interface is a Universal Serial Bus (USB) interface.

15. The probe system according to claim 1, wherein the at least one image capture device includes at least one of a charge-coupled device (CCD) camera and a complementary metal-oxide-semiconductor (CMOS) camera.

16. A coordinate measuring machine for measuring the at least one measurement object in the optical and tactile fashion, the coordinate measuring machine comprising:

the probe system according to claim 1,

at least one control and evaluation unit configured to control the probe system and to produce at least one information item about a tactile measurement point at a surface of the at least one measurement object.

17. A method for measuring the at least one measurement object in the optical and tactile fashion by a coordinate measuring machine according to claim 16, the method comprising:

a) tactile probing the at least one measurement object at the at least one probing point on at least one sensor surface with the at least one tactile probe element of the at least one tactile sensor and producing the at least one information item about the tactile measurement point, wherein the at least one information item about the tactile measurement point is at least one first information item;

b) transmitting the at least one first information item about the tactile measurement point to the at least one control and evaluation unit;

c) controlling the at least one microscope camera based on the at least one first information item by the at least one control and evaluation unit;

d) optically probing of the at least one measurement object with the at least one microscope camera at least partly arranged in the at least one tactile probe element, wherein the illumination light beam is produced by the at least one illumination device of the at least one microscope camera, wherein the illumination light beam is focused in the at least one probing point on the at least one sensor surface of the at least one tactile probe element by the at least one microscope optical unit, wherein the at least one magnified image of the at least one measurement object is produced in the image plane by the at least one microscope optical unit, wherein the magnified image is recorded by the at least one image capture device;

e) transmitting the magnified image to the at least one control and evaluation unit; and

f) evaluating the at least one first information item about at least one of the tactile measurement point and the magnified image with the control and evaluation unit and producing a second information item about at least one coordinate of the at least one measurement object by the control and evaluation unit.

18. The method according to claim 17, wherein a calibration of the probe system is implemented in step a).