Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve tunneling electrode gap

• US 10,641,726 B2
• Filed: 02/01/2018
• Issued: 05/05/2020
• Est. Priority Date: 02/01/2017
• Status: Active Grant

• Current Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Original Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Inventors: Kuo, David S., Yang, Xiaomin, Xiao, ShuaiGang, Lee, Kim Yang, Wago, Koichi, Chang, Thomas Young
• Primary Examiner(s): Noguerola, Alexander S
• Application Number:
  US15/886,581
• Publication Number:
  US 20180217083A1
• Time in Patent Office: 824 Days
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B81C 1/00547 Etching processes not provided for in groups B81C1/00531 - B81C1/00539
• CPC Class Codes: B81C 2201/0132 Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
• CPC Class Codes: B82Y 5/00 Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
• CPC Class Codes: C12Q 1/6809 Methods for determination or identification of nucleic acids involving differential detection
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: C12Q 2565/631 being a biochannel or pore
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

A DNA sequencing device, and related methods, include a nanopore or nanochannel structure, and a nanoelectrode. The nanoelectrode includes electrode members having free ends exposed within the nanopore or nanochannel structure, an electrode gap defined between of the free ends, and plated portions formed on the free ends to provide a reduced sized for the electrode gap.

Claims

1. A DNA sequencing device, comprising:

a nanopore or nanochannel structure having a width in the range of about 5 nm to about 20 nm; and

a nanoelectrode comprising;

electrode members having free ends exposed within the nanopore or nanochannel structure, the free ends comprising plated portions defining an electrode gap in the range of about 0.3 nm to about 2.0 nm.

2. The DNA sequencing device of claim 1, wherein the nanopore or nanochannel structure is formed in an insulator substrate, the insulator substrate comprising SiO₂ or glass.

3. The DNA sequencing device of claim 1, wherein the nanopore or nanochannel structure has a width in the range of about 10 nm to about 20 nm.

4. The DNA sequencing device of claim 1, further comprising:

electrode contacts electrically connected to the nanoelectrode; and

a controller electrically connected to the electrode contacts and operable to detect an electronic signal measured between the electrode members.

5. The DNA sequencing device of claim 1, further comprising an energy source operable to draw a DNA strand through the nanopore or nanochannel.

6. A method of DNA sequencing, comprising:

providing a DNA sequencing device having a nanopore or nanochannel structure having a width of about 5 nm to about 20 nm, and a nanoelectrode, the nanoelectrode having first and second electrode members with free ends exposed within the nanopore or nanochannel structure, the free ends comprising plated portions, the plated portions defining an electrode gap of about 0.3 nm to about 2.0 nm;

drawing a DNA strand through the nanopore or nanochannel and the electrode gap;

detecting, with the nanoelectrode, electronic signals associated with separate nucleotides of the DNA strand;

determining an order of the nucleotides based on the detected electronic signals.

7. The method of claim 6, wherein the plated portions comprise a different material from the first and second electrode members.

8. The method of claim 6, wherein the DNA sequencing device further comprises a controller operable to conduct the determining of the order of the nucleotides.

9. The method of claim 6, wherein the width of the nanopore or nanochannel is in the range of about 10 nm to about 20 nm.

10. The method of claim 6, wherein a height of the nanopore or nanochannel is in the range of about 10 nm to about 20 nm.

11. The method of claim 6, wherein the nanopore or nanochannel structure is formed in an insulator substrate, the insulator substrate comprising SiO₂ or glass.