Active mechanical-environmental-thermal MEMS device for nanoscale characterization

• US 10,641,733 B2
• Filed: 03/19/2018
• Issued: 05/05/2020
• Est. Priority Date: 03/20/2017
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Inventors: Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid M., Galambos, Paul C., Leenheer, Andrew Jay, Hearne, Sean J.
• Primary Examiner(s): Amara, Mohamed K
• Application Number:
  US15/925,118
• Publication Number:
  US 20180266989A1
• Time in Patent Office: 778 Days
• CPC Class Codes: G01N 2203/0017 Tensile
• CPC Class Codes: G01N 2203/0286 Miniature specimen; Testing on microregions of a specimen
• CPC Class Codes: G01N 27/44791 Microapparatus sample containers with integrated microfluidic structures B01L3/5027
• CPC Class Codes: G01N 3/02 Details
• CPC Class Codes: G01N 3/08 by applying steady tensile or compressive forces G01N3/28 takes precedence
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize

Abstract

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.

Claims

1. A EMS device for micro-to-nanoscale characterization, comprising:

a sealed environmental chamber comprising a sample holder for physical control of a material sample and a membrane window for transmitting radiation into the sealed environmental chamber for characterization of the material sample; and

a moveable piston attached to the sample holder for applying a mechanical force to the material sample, herein the piston can be moved by an actuator external to the sealed environmental chamber.

2. The MEMS device of claim 1, wherein the device is fabricated using surface and bulk silicon micromachining.

3. The MEMS device of claim 1, further comprising a heater for heating the material sample.

4. The MEMS device of claim 1, further corn comprising electrical contacts connected to the material sample for electrochemical measurement.

5. The MEMS device of claim 1, further comprising a sensor connected to the actuator that provides quantitative measurement of the piston displacement.

6. The MEMS device of claim 1, wherein the radiation comprises photons, electrons, or x-rays.

7. The EMS device of claim 1, wherein the membrane window comprise silicon nitride.

8. The MEMS device of claim 1, wherein the membrane window has a thickness of less than 100 nm.

9. The MEMS device of claim 1, wherein the distance between the membrane window and the material sample is less than 1 μ

m.

10. The MEMS device of claim 1, further comprising and a second membrane window for transmitting radiation from the material sample out of the sealed environmental chamber.

11. The MEMS device of claim 1, wherein the radiation transmitted into the sealed environmental chamber comprises an electron beam of a transmission electron microscope and wherein the membrane is transparent to the electron beam.

12. The MEMS ice of claim 1, wherein the mechanical force comprises a tensile force.