Electronic device, electronic device apparatus, electronic apparatus, and moving object

• US 10,641,788 B2
• Filed: 09/21/2017
• Issued: 05/05/2020
• Est. Priority Date: 09/30/2016
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kawano, Shuichi
• Primary Examiner(s): Naraghi, Ali
• Application Number:
  US15/711,144
• Publication Number:
  US 20180095105A1
• Time in Patent Office: 957 Days
• Field of Search: None
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 3/44 for measuring angular speed G01P3/56 takes precedence
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48463 the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
• CPC Class Codes: H01L 2224/49109 outside the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation
• CPC Class Codes: H05K 1/118 specially for flexible printed circuits, e.g. using folded portions

Abstract

An electronic device includes a base body, a functional element disposed on the base body, a wiring disposed on the base body and electrically connected to the functional element, and a terminal disposed on the base body and electrically connected to the wiring, wherein the terminal includes a non-overlapping region which does not overlap with the wiring. Further, the terminal includes an overlapping region which overlaps with the wiring.

Claims

1. An electronic device comprising:

a base body having first and second surfaces facing away from each other;

a functional element disposed on the first surface of the base body;

an electrode layer disposed on the first surface of the base body, the electrode layer being electrically connected to the functional element, the electrode layer being partially overlapped with the functional element in a plan view; and

a terminal disposed on the first surface of the base body, a first part of the terminal directly contacting the first surface of the base body in the plan view, a second part of the terminal directly contacting the electrode layer in the plan view, the terminal being electrically connected to the electrode layer such that the second part of the terminal indirectly contacts the first surface of the base body,

wherein the second part of the terminal surrounds the first part of the terminal in the plan view.

2. The electronic device according to claim 1,

wherein the terminal is configured with a main layer and an intermediate layer stacked on the main layer so that the intermediate layer is disposed between the electrode layer and the main layer in the second part of the terminal.

3. The electronic device according to claim 2,

wherein the intermediate layer is also disposed between the first surface of the base body and the main layer in the first part of the terminal.

4. An electronic device apparatus comprising:

the electronic device according to claim 3,

a circuit element; and

a bonding wire electrically connecting the terminal of the electronic device to the circuit element,

wherein the bonding wire is connected to the first part of the terminal.

5. A moving object comprising:

the electronic device according to claim 3; and

a posture control device.

6. The electronic device according to claim 2,

wherein the electrode layer is configured with:

a foundation layer directly disposed on the first surface of the base body, and

a conductive layer directly stacked on the foundation layer, the conductive layer being located farther away from the base body than the foundation layer, and

the foundation layer is composed of Ti or an alloy containing Ti, and

the conductive layer is composed of Pt, Au, Ag, Pd, Rh, Ir, Ru, Os, or an alloy containing any of Pt, Au, Ag, Pd, Rh, Ir, Ru, or Os.

7. The electronic device according to claim 6,

wherein the terminal is composed of Au, Cu, Al, or an alloy containing any of Au, Cu, or Al.

8. The electronic device according to claim 7,

wherein the intermediate layer is composed of Ti, W, Ta, Ni, Co, Cr, Mo, or an alloy containing any of Ti, W, Ta, Ni, Co, Cr, or Mo.

9. An electronic apparatus comprising:

the electronic device according to claim 6;

a display; and

a housing that houses the electronic device and the display.

10. A moving object comprising:

the electronic device according to claim 6; and

a posture control device.

11. An electronic device apparatus comprising:

the electronic device according to claim 2;

a circuit element; and

a bonding wire electrically connecting the terminal of the electronic device to the circuit element,

wherein the bonding wire is connected to the first part of the terminal.

12. The electronic device apparatus according to claim 11, wherein the same material is any of Au, Cu, and Al.

13. A moving object comprising:

the electronic device according to claim 2; and

a posture control device.

14. The electronic device according to claim 1,

wherein the first surface of the base body on which the electrode layer and the terminal are disposed contains an insulating oxide.

15. The electronic device according to claim 1, wherein the functional element is at least any of an acceleration sensor element, an angular velocity sensor element, a pressure sensor element, and a magnetic sensor element.

16. An electronic device apparatus comprising:

the electronic device according to claim 1;

a circuit element; and

a bonding wire electrically connecting the terminal of the electronic device to the circuit element,

wherein the bonding wire is connected to the first part of the terminal.

17. The electronic device apparatus according to claim 16,

wherein the first part of the terminal and the bonding wire contain a same material.

18. A moving object comprising:

the electronic device according to claim 1; and

a posture control device.