Scanning probe microscope

• US 10,641,790 B2
• Filed: 03/01/2019
• Issued: 05/05/2020
• Est. Priority Date: 04/18/2018
• Status: Active Grant

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: Watanabe, Kazuma, Fujino, Keita, Iida, Eiji, Hirade, Masato, Yamasaki, Kenji, Nakajima, Hideo, Ikeda, Yuichiro, Arai, Hiroshi
• Primary Examiner(s): Ippolito, Nicole M
• Application Number:
  US16/290,334
• Publication Number:
  US 20190324053A1
• Time in Patent Office: 431 Days
• Field of Search: 850 1, 850 2, 850 3, 850 4, 850 5, 850 6, 850 7
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor

Abstract

Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.

Claims

1. A scanning probe microscope comprising:

a cantilever relatively displaced along a surface of a sample;

a light irradiator that emits light toward the cantilever;

a photodetector that receives light reflected from the cantilever to output a detection signal corresponding to bending of the cantilever;

a scanning processor that performs scanning by relatively displacing the cantilever in an X-direction and a Y-direction relative to the surface of the sample, the X-direction and the Y-direction intersecting each other;

a main measurement processor that performs main measurement to acquire a surface image of a sample based on the detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning the cantilever at predetermined second interval in the Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along the X-direction; and

a preliminary measurement processor that performs preliminary measurement to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.

2. The scanning probe microscope according to claim 1, wherein the preliminary measurement processor starts the scanning from a central portion of the measurement range.

3. The scanning probe microscope according to claim 1, wherein the preliminary measurement processor simultaneously scans the cantilever in the X-direction and the Y-direction.

4. The scanning probe microscope according to claim 1, wherein the preliminary measurement processor repeats processing of scanning the cantilever in the Y-direction after scanning the cantilever in the X-direction on a line shorter than the predetermined length.

5. The scanning probe microscope according to claim 1, further comprising a determination processor that determines existence of an observation object in the surface image of the sample acquired by the preliminary measurement.

6. The scanning probe microscope according to claim 5, wherein the main measurement processor performs the main measurement when the determination processor determines that the observation object exists in the surface image of the sample.