Magnetic sensor circuit, test method for the same, and manufacturing method for a semiconductor device having a magnetic sensor circuit

• US 10,641,841 B2
• Filed: 03/12/2018
• Issued: 05/05/2020
• Est. Priority Date: 03/14/2017
• Status: Active Grant

• Current Assignee: Ablic Inc. (MinebeaMitsumi Inc.)
• Original Assignee: Ablic Inc. (MinebeaMitsumi Inc.)
• Inventors: Hikichi, Tomoki
• Primary Examiner(s): Nguyen, Tung X
• Assistant Examiner(s): Hawkins, Dominic E
• Application Number:
  US15/918,481
• Publication Number:
  US 20180267112A1
• Time in Patent Office: 785 Days
• CPC Class Codes: G01D 18/00 Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
• CPC Class Codes: G01D 5/145 influenced by the relative movement between the Hall device and magnetic fields see G01R33/06
• CPC Class Codes: G01R 33/0023 Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration G01R33/0017 takes precedence
• CPC Class Codes: G01R 33/0035 Calibration of single magnetic sensors, e.g. integrated calibration
• CPC Class Codes: G01R 33/02 Measuring direction or magnitude of magnetic fields or magnetic flux G01R33/20 takes precedence

Abstract

A magnetic sensor circuit includes: one of a first magnetic sensor element configured to output a voltage in accordance with a vertical magnetic field and a second magnetic sensor element configured to output a voltage in accordance with a horizontal magnetic field; a magnetic field signal processing circuit configured to output a signal in accordance with the voltage; at least three terminals capable of being connected to an external element, the at least three terminals being a first, a second, and a third terminal; a first wiring connecting the first terminal and the second terminal; and a second wiring connecting the first terminal and the third terminal in which one of the first magnetic sensor element and the second magnetic sensor element is arranged at a position where detection of a magnetic field generated by one of the first wiring and the second wiring is capable.

Claims

1. A magnetic sensor circuit, comprising:

one of a first magnetic sensor element configured to output a voltage in accordance with a vertical magnetic field and a second magnetic sensor element configured to output a voltage in accordance with a horizontal magnetic field;

a magnetic field signal processing circuit configured to output a signal in accordance with the voltage;

at least three terminals configured to be connected to an external element, the at least three terminals being a first terminal, a second terminal, and a third terminal;

a first wiring connecting the first terminal and the second terminal; and

a second wiring connecting the first terminal and the third terminal,

one of the first magnetic sensor element and the second magnetic sensor element being arranged at a position where detection of a magnetic field generated by one of the first wiring and the second wiring is possible.

2. The magnetic sensor circuit according to claim 1:

wherein the first wiring is a wiring through which a current which generates a detection target of the second magnetic sensor element flows;

wherein the second wiring is a wiring through which a current which generates a detection target of the first magnetic sensor element flows;

wherein the first magnetic sensor element is arranged at the position at which the first magnetic sensor element is configured to detect the magnetic field generated by the second wiring; and

wherein the second magnetic sensor element is arranged at the position at which the second magnetic sensor element can detect the magnetic field generated by the first wiring.

3. The magnetic sensor circuit according to claim 1:

wherein the first wiring permits a current flow therethrough in both of a direction from the first terminal to the second terminal and a direction from the second terminal to the first terminal; and

wherein the second wiring permits a current flow therethrough in both of a direction from the first terminal to the third terminal and a direction from the third terminal to the first terminal.

4. The magnetic sensor circuit according to claim 1:

wherein the second magnetic sensor element is selected from the first magnetic sensor element and the second magnetic sensor element; and

wherein the second magnetic sensor element is arranged at one of a position below the first wiring and a position below the second wiring.

5. A test method for the magnetic sensor circuit of claim 1, comprising:

performing a magnetic field application test for one of the first magnetic sensor element and the second magnetic sensor element by applying a current which is larger than a current that flows through the magnetic sensor circuit under normal operation to flow through one of the first wiring and the second wiring.

6. A manufacturing method for a semiconductor device having a magnetic sensor circuit, comprising:

forming the magnetic sensor circuit of claim 1; and

performing a test to the magnetic sensor circuit using the test method of claim 5.

7. A magnetic sensor circuit, comprising:

a magnetic sensor element configured to output a voltage in accordance with a magnetic field;

a magnetic field signal processing circuit configured to output a signal in accordance with the voltage;

at least two terminals configured to be connected to an external element, the at least two terminals being a first terminal and a second terminal; and

a wiring connecting the first terminal and the second terminal, and through which a current larger than a current that flows through the magnetic sensor circuit under normal operation is applied,

the magnetic sensor element being arranged at a position where detection of a magnetic field generated by the wiring is possible.