Optical dispersion compensator on silicon

• US 10,641,965 B2
• Filed: 12/09/2019
• Issued: 05/05/2020
• Est. Priority Date: 08/03/2017
• Status: Active Grant

• Current Assignee: Marvell Asia Pte Limited (Marvell Technology Group Limited)
• Original Assignee: Inphi Corporation
• Inventors: Tu, Xiaoguang, Nagarajan, Radhakrishnan L., Kato, Masaki
• Primary Examiner(s): Pak, Sung H
• Application Number:
  US16/708,172
• Publication Number:
  US 20200110220A1
• Time in Patent Office: 148 Days
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/1215 Splitter
• CPC Class Codes: G02B 2006/12159 Interferometer
• CPC Class Codes: G02B 6/021 characterised by the core or cladding or coating, e.g. materials, radial refractive index profiles, cladding shape
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02B 6/29394 Compensating wavelength dispersion G02B6/29376 takes precedence; dispersion compensated optical transmission systems H04B10/2507
• CPC Class Codes: G02B 6/29395 configurable, e.g. tunable or reconfigurable switching G02B6/35
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: H04B 10/25133 including a lumped electrical or optical dispersion compensator H04B10/2519, H04B10/2525 takes precedence

Abstract

An optical dispersion compensator integrated with a silicon photonics system including a first phase-shifter coupled to a second phase-shifter in parallel on the silicon substrate characterized in an athermal condition. The dispersion compensator further includes a third phase-shifter on the silicon substrate to the first phase-shifter and the second phase-shifter through two 2×2 splitters to form an optical loop. A second entry port of a first 2×2 splitter is for coupling with an input fiber and a second exit port of a second 2×2 splitter is for coupling with an output fiber. The optical loop is characterized by a total phase delay tunable via each of the first phase-shifter, the second phase-shifter, and the third phase-shifter such that a normal dispersion (>0) at a certain wavelength in the input fiber is substantially compensated and independent of temperature.

Claims

1. An optical dispersion compensator comprising:

a first phase-shifter;

a second phase-shifter;

a first 2×

2 splitter having a first exit port coupled to an input port of the first phase-shifter and a second exit port coupled to an input port of the second phase-shifter;

a second 2×

2 splitter having a first entry port coupled to an output port of the first phase-shifter and a second entry port coupled to an output port of the second phase-shifter;

a third phase-shifter on the silicon substrate having an input port coupled to a first exit port of the second 2×

2 splitter and an output port coupled to a first entry port of the first 2×

2 splitter to form an optical loop with the first phase-shifter and the second phase-shifter;

wherein the second entry port of the first 2×

2 splitter is configured as an external input and the second exit port of the second 2×

2 splitter is configured as an external output, wherein the optical loop is characterized by a total phase delay tunable via each of the first phase-shifter, the second phase-shifter, and the third phase-shifter such that a normal dispersion (>

0) at a certain wavelength in the external input is substantially compensated and independent of temperature.

2. The optical dispersion compensator of claim 1, wherein the first phase-shifter is a first waveguide formed on the silicon substrate, the second phase-shifter is a second waveguide formed on the same silicon substrate, the second waveguide coupled with the first waveguide in parallel to form a Mach-Zehnder interferometer, and the third phase-shifter is a third waveguide formed on the same silicon substrate.

3. The optical dispersion compensator of claim 2, wherein the first waveguide comprises a first core material with a first index of refraction and an elongated shape of the first length embedded in a first cladding material on the silicon substrate yielding a first phase delay at the certain wavelength, the second waveguide comprises a second core material with a second index of refraction and an elongated shape of the second length embedded in the first cladding material on the silicon substrate yielding a second phase delay at the certain wavelength, the third waveguide comprises a third core material with a third index of refraction and an elongated shape of the third length embedded in a second cladding material filled in a window of the first cladding material on the silicon substrate yielding a third phase delay at the certain wavelength.

4. The optical dispersion compensator of claim 3, wherein the total phase delay is a manifestation of the first phase delay, the second phase delay, and the third phase delay associated with the Mach-Zehnder interferometer and the optical loop to achieve an abnormal dispersion (<

0) that just compensates the normal dispersion at the certain wavelength in the external input.

5. The optical dispersion compensator of claim 2, wherein the silicon substrate is a silicon-on-insulator substrate used for forming a chip of the silicon photonics system.

6. The optical dispersion compensator of claim 3, wherein the first core material and the second core material are at least one material selected from single crystal silicon, poly-crystal silicon, SiN, Si₃N₄, SiON, and silicon germanium alloy, and the third core material comprises a material selected from single crystal silicon, poly-crystal silicon, SiN, Si₃N₄, SiON, and silicon germanium alloy.

7. The optical dispersion compensator of claim 6, wherein the first cladding material comprises a material having an index of refraction smaller than each of the first index of refraction and the second index of refraction, selected from SiO₂, SiN, Si₃N₄, SiON, Air, silicon germanium alloy, and indium tin oxide, the second cladding material comprises a material having an index of refraction smaller than the third index of refraction and a negative thermal-optical coefficient, selected from Polymethyl Methacrylate (PMMA) and Potassium Aluminophosphate glass (KAP).

8. The optical dispersion compensator of claim 3, wherein each of the first core material, the second core material, and the third core material comprises a cross-section shape selected from a rectangle, a combination of two rectangles, and a triangle.

9. The optical dispersion compensator of claim 3, wherein the first phase-shifter, the second phase-shifter, and the third phase-shifter comprises respectively a first heating element, a second heating element, and a third heating element for independently tuning the first index of refraction, the second index of refraction, and the third index of refraction by changing temperature thereof.

10. The optical dispersion compensator of claim 9, wherein the first phase-shifter and the second phase-shifter are substantially limited under an athermal condition that a temperature variation of a first effective index of refraction multiplied by the first length cancels a temperature variation of a second effective index of refraction multiplied by the second length, wherein the first effective index of refraction is resulted from both the first core material and the first cladding material and the second effective index of refraction is resulted from both the second core material and the first cladding material;

the third phase-shifter is configured to ensure that a temperature variation of a third effective index of refraction resulted from both the third core material and the second cladding material is substantially zero.

11. The optical dispersion compensator of claim 1, wherein the external input is a single-mode fiber.

12. The optical dispersion compensator of claim 1, wherein the certain wavelength can be at least one wavelength corresponding to one channel selected from a broad band for telecommunication.

13. The optical dispersion compensator of claim 1, wherein each of the first 2×

2 splitter and the second 2×

2 splitter is one selected from a multimode-interference (MMI) coupler and a directional coupler.

14. The optical dispersion compensator of claim 1, wherein the first phase-shifter and the second phase-shifter including at least the first 2×

2 splitter can be used as a duplicate phase-shifter unit cascaded in series multiple times in the optical loop that couples with the third phase-shifter for achieving different values in total phase delay, wherein each phase-shifter unit is constrained under the athermal condition that a temperature variation of a first effective index of refraction multiplied by the first length of the first phase-shifter therein cancels a temperature variation of a second effective index of refraction multiplied by the second length of the second phase-shifter therein.

15. The optical dispersion compensator of claim 1, wherein the third phase-shifter is a combined phase-shifter including two waveguides coupled to each other in parallel, the two waveguides being respectively coupled with the first entry port of the first 2×

2 splitter via a first 1×

2 splitter and the first exit port of the second 2×

2 splitter via a second 2×

1 splitter to form the optical loop, wherein the two waveguides are either two identical ones or constrained under an athermal condition that a temperature variation of a first effective index of refraction multiplied by a first length of a first one of the two waveguides therein cancels a temperature variation of a second effective index of refraction multiplied by a second length of a second one of the two waveguides therein.

16. The optical dispersion compensator of claim 15, wherein the third phase-shifter can be further used as a duplicate phase-shifter unit cascaded in parallel multiple times in the optical loop associated with the first phase-shifter and the second phase-shifter for achieving different values of total phase delay.

17. A method for forming an optical dispersion compensator, comprising:

providing a silicon-on-insulator substrate;

forming a first waveguide in a first cladding material on the silicon-on-insulator substrate, the first waveguide being optically coupled to a first 2×

2 coupler;

forming a second waveguide in the first cladding material on the silicon-on-insulator substrate, the second waveguide being optically coupled to the first waveguide in parallel and coupled to a second 2×

2 coupler;

forming a window of the first cladding material;

forming third waveguide in the window, the third waveguide being surrounded by a second cladding material filled in the window, the third waveguide being coupled to a first entry port of the first 2×

2 coupler and a first exit port of the second 2×

2 coupler to form an optical loop with the first waveguide and the second waveguide;

coupling a second entry port of the first 2×

2 coupler to an external input and a second exit port of the second 2×

2 coupler to an external output;

wherein the optical loop is characterized by a total phase delay tunable via each of the first waveguide, the second waveguide, and the third waveguide such that a normal dispersion (>

0) at a certain wavelength in the external input is substantially compensated and independent of temperature.

18. The method of claim 17, wherein forming the first waveguide and the second waveguide comprises forming at least a heating element configured to tune phase delays of the first waveguide and the second waveguide.

19. The method of claim 17, wherein forming the first waveguide and the second waveguide further comprises selecting proper core materials and lengths respectively for the first waveguide and the second waveguide and cladding material for the first cladding material such that a combination of the first waveguide and the second waveguide is constrained to an athermal condition that a temperature variation of a first effective index of refraction multiplied by a first length of the first waveguide cancels a temperature variation of a second effective index of refraction multiplied by a second length of the waveguide.

20. The method of claim 17, wherein forming the third waveguide comprises selecting proper core material and length for the third waveguide and cladding material for the second cladding material such that the third waveguide is constrained to an athermal condition that a temperature variation of an effective index of refraction is substantially zero.

21. The method of claim 17, wherein forming the third waveguide further comprises forming a combined phase-shifter including two waveguides coupled to each other in parallel, the two waveguides being respectively coupled with the first entry port of the first 2×

2 splitter via a first 1×

2 splitter and the first exit port of the second 2×

2 splitter via a second 2×

1 splitter to form the optical loop, wherein the two waveguides are either two identical ones or constrained under an athermal condition that a temperature variation of a first effective index of refraction multiplied by a first length of a first one of the two waveguides therein cancels a temperature variation of a second effective index of refraction multiplied by a second length of a second one of the two waveguides therein.

22. The method of claim 19, further comprising cascading in series multiple units of the first waveguide and the second waveguide in the optical loop with the third waveguide for achieving different values of total phase delay, each unit of the first waveguide and the second waveguide being coupled in parallel to each other and still satisfied the athermal condition.

23. The method of claim 21, further comprising cascading in parallel multiple units of the combined phase-shifter in the optical loop with the first waveguide and the second waveguide for achieving different values of total phase delay, wherein each unit of the combined phase-shifter is constrained under the athermal condition.