Optical beam steering with directionality provided by switched grating couplers

• US 10,642,125 B1
• Filed: 07/29/2019
• Issued: 05/05/2020
• Est. Priority Date: 07/29/2019
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Ellis-Monaghan, John J., Shank, Steven M., Jain, Vibhor, Stamper, Anthony K., Pekarik, John J.
• Primary Examiner(s): Stahl, Michael
• Application Number:
  US16/524,870
• Time in Patent Office: 281 Days
• Field of Search: None
• CPC Class Codes: G02F 1/313 in an optical waveguide structure
• CPC Class Codes: G02F 2201/302 grating coupler
• CPC Class Codes: G02F 2203/24 beam steering

Abstract

Structures providing optical beam steering and methods of fabricating such structures. A first grating coupler has a first plurality of grating structures spaced with a first pitch along a first axis. A second grating coupler has a second plurality of grating structures spaced with a second pitch along a second axis. An optical switch is coupled to the first grating coupler and to the second grating coupler. The optical switch is configured to select between the first grating coupler and the second grating coupler for optical signal routing. The second axis of the second grating coupler is aligned nonparallel to the first axis of the first grating coupler.

Claims

1. A structure comprising:

an input waveguide;

a first grating coupler including a first plurality of grating structures spaced with a first pitch along a first axis;

a second grating coupler including a second plurality of grating structures spaced with a second pitch along a second axis;

a first optical switch coupled to the first grating coupler and to the second grating coupler, the first optical switch configured to select between the first grating coupler and the second grating coupler for optical signal routing; and

a second optical switch located between the input waveguide and the first optical switch, the second optical switch coupled to the first optical switch,

wherein the second axis of the second grating coupler is aligned nonparallel to the first axis of the first grating coupler.

2. The structure of claim 1 further comprising:

a third grating coupler coupled to the second optical switch,

wherein the second optical switch is configured to select between the third grating coupler and the first optical switch for optical signal routing.

3. The structure of claim 2 wherein the third grating coupler includes a third plurality of grating structures spaced with a third pitch along a third axis, the third axis is aligned nonparallel to the first axis, and the third axis is aligned nonparallel to the second axis.

4. The structure of claim 3 wherein the first pitch and the second pitch are not equal, the first pitch and the third pitch are not equal, and the second pitch and the third pitch are not equal.

5. The structure of claim 2 wherein the third grating coupler includes a third plurality of grating structures spaced with a third pitch along a third axis, and the third axis is aligned parallel to the first axis.

6. The structure of claim 1 wherein the first pitch is equal to the second pitch.

7. The structure of claim 1 wherein the first pitch and the second pitch are not equal.

12. The structure of claim 1 wherein the first grating coupler, the second grating coupler, the first optical switch, and the second optical switch are located on a photonics chip.

13. The structure of claim 1 further comprising:

a first laser configured to emit a first stream of optical signals,

wherein the first laser is coupled by the input waveguide with the second optical switch.

14. The structure of claim 13 wherein the first laser is configured to operate at a first wavelength, and further comprising:

a second laser configured to emit a second stream of optical signals, the second laser coupled by the input waveguide with the second optical switch.

18. The structure of claim 1 further comprising:

a connecting waveguide,

wherein the second optical switch is coupled to the first optical switch by the connecting waveguide.

19. The structure of claim 1 further comprising:

an active layer arranged over the first plurality of grating structures, the active layer comprised of a tunable material having a temperature-dependent index of refraction.

8. A structure comprising:

a first grating coupler including a first plurality of grating structures spaced with a first pitch along a first axis;

a second grating coupler including a second plurality of grating structures spaced with a second pitch along a second axis;

an optical switch coupled to the first grating coupler and to the second grating coupler, the optical switch configured to select between the first grating coupler and the second grating coupler for optical signal routing; and

an active layer arranged over the first plurality of grating structures, the active layer comprised of a tunable material having a temperature-dependent index of refraction,

wherein the second axis of the second grating coupler is aligned nonparallel to the first axis of the first grating coupler.

9. The structure of claim 8 further comprising:

an interconnect structure including a first contact connected with the active layer, a second contact connected with the active layer, and a back-end-of-line stack including wiring located over the active layer and the first plurality of grating structures,

wherein the first contact and the second contact couple the active layer to the wiring in the back-end-of-line stack.

10. The structure of claim 9 wherein the interconnect structure further includes a heater located adjacent to the active layer.

11. The structure of claim 8 further comprising:

a heater located adjacent to the active layer.

20. The structure of claim 8 further comprising:

a first laser configured to emit a first stream of optical signals at a first wavelength;

an input waveguide coupling the first laser with the optical switch; and

a second laser configured to emit a second stream of optical signals, the second laser coupled by the input waveguide with the optical switch.

15. A method comprising:

forming an input waveguide;

forming a first grating coupler having a first plurality of grating structures spaced with a first pitch along a first axis;

forming a second grating coupler having a second plurality of grating structures spaced with a second pitch along a second axis;

forming a first optical switch coupled to the first grating coupler and the second grating coupler;

forming a second optical switch located in an optical path between the input waveguide and the first optical switch; and

forming a third grating coupler coupled to the second optical switch,

wherein the second optical switch is coupled to the first optical switch, and the second axis of the second grating coupler is aligned nonparallel to the first axis of the first grating coupler.

16. The method of claim 15 wherein the first pitch and the second pitch are not equal.

17. The method of claim 15 further comprising:

forming an active layer arranged over the first plurality of grating structures; and

forming a heater proximate to the active layer,

wherein the active layer comprises a tunable material having a temperature-dependent index of refraction.