Pellicle support frame and production method

• US 10,642,151 B2
• Filed: 09/09/2015
• Issued: 05/05/2020
• Est. Priority Date: 11/04/2014
• Status: Active Grant

• Current Assignee: Nippon Light Metal Company Limited (Nippon Light Metal Holdings Co., Ltd.)
• Original Assignee: Nippon Light Metal Company Limited (Nippon Light Metal Holdings Co., Ltd.)
• Inventors: Ishito, Nobuyuki
• Primary Examiner(s): Angebranndt, Martin J
• Application Number:
  US15/524,234
• Publication Number:
  US 20170343894A1
• Time in Patent Office: 1,700 Days
• CPC Class Codes: B23K 20/00 Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
• CPC Class Codes: C25D 11/04 of aluminium or alloys based thereon
• CPC Class Codes: G03F 1/62 Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor

Abstract

A pellicle support frame is provided with a frame body made of aluminum alloy and has a pellicle film bonded to the upper surface of the frame body and a transparent substrate bonded to the lower surface of the frame body. Within the frame body, a plurality of hollow portions are provided to be lined up in the circumferential direction of the frame body, and a through-hole which leads from the outer peripheral surface to the inner peripheral surface of the frame body is formed between two adjacent hollow portions. This configuration makes it possible to prevent strain from arising in the support frame and the transparent substrate after the support frame is bonded to the transparent substrate.

Claims

1. A pellicle support frame comprising:

a frame body made of aluminum alloy and adapted to allow a pellicle film to be bonded to an upper surface thereof and to allow a transparent substrate to be bonded to a lower surface thereof, wherein the frame body consists of two frame members bonded together at their bonding surfaces, each of the two frame members being composed of one member having an outer rectangular shape in the planar direction;

a plurality of hollow portions provided within the frame body arranged in a circumferential direction of the frame body, and the hollow portions are not communicated with an external space;

a through-hole formed between two adjacent hollow portions of the plurality of hollow portions, the through-hole leading from an outer peripheral surface to an inner peripheral surface of the frame body; and

a plurality of grooves provided to be arranged in the circumferential direction on at least one of bonding surfaces of the two frame members, the bonding surfaces lying in a direction along the circumferential direction of the two frame members and the grooves forming the hollow portions.

2. The pellicle support frame according to claim 1, wherein the bonding surfaces of the two frame members are bonded directly to each other.

3. The pellicle support frame according to claim 2, wherein the bonding surfaces of the two frame members are bonded by at least one of diffusion bonding and vapor deposition using a focused ion beam.

4. The pellicle support frame according to claim 2, wherein the two frame members have the same shape and both of the frame members are oppositely disposed in the upper-lower direction.

5. The pellicle support frame according to claim 1, further comprising:

a plurality of cylindrical holes each having a bottom formed in the outer peripheral surface of the frame body.

6. The pellicle support frame according to claim 1, wherein the inner peripheral wall and the outer peripheral wall of at least one hollow portion of the frame body are thicker than the upper and lower walls of the at least one hollow portion.

7. The pellicle support frame according to claim 1, wherein at least one of the plurality of hollow portions is longer in the circumferential direction than at least one other of the plurality of hollow portions.

8. A production method for a pellicle support frame consisting of two frame members made of aluminum alloy and each having an outer rectangular shape in the planar direction, comprising:

a step of forming a plurality of grooves on at least one of the bonding surfaces of the two frame members, the bonding surfaces lying in a direction along a circumferential direction of the two frame members; and

a step of bonding the bonding surfaces of the two frame members, each frame member being composed of one member, wherein each of the plurality of grooves of the two bonded frame members forms a hollow rectangular shaped portion that is not communicated with an external space.

9. The production method for the pellicle support frame, according to claim 8, wherein the two frame members are subjected to solid-phase bonding.

10. The production method for the pellicle support frame, according to claim 8, wherein

the step of bonding the bonding surfaces of the two frame members to each other includes bonding the bonding surfaces of the two frame members directly to each other.

11. The production method for the pellicle support frame, according to claim 10, wherein the step of bonding the bonding surfaces of the two frame members to each other includes at least one of diffusion bonding and vapor deposition using a focused ion beam.