Methodology to generate a guiding template for directed self-assembly

• US 10,642,152 B2
• Filed: 10/10/2014
• Issued: 05/05/2020
• Est. Priority Date: 11/08/2013
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Wuister, Sander Frederik, Ambesi, Davide
• Primary Examiner(s): Dinh, Paul
• Application Number:
  US15/034,810
• Publication Number:
  US 20160266486A1
• Time in Patent Office: 2,034 Days
• Field of Search: 716 55
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G06F 2119/18 Manufacturability analysis or optimisation for manufacturability
• CPC Class Codes: G06F 30/39 Circuit design at the physical level physical level design for reconfigurable circuits G06F30/347

Abstract

A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout for lithography, the feature guiding template including at least two portions joined by a bottleneck, the method including determining a characteristic of the feature guiding template based on at least a function of geometry of the feature guiding template including a value of a first width of at least one of the portions, a value of a second width of the bottleneck, or a value based on both the first width and the second width.

Claims

1. A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout, the feature guiding template comprising at least two portions joined by a bottleneck, the method comprising:

determining a characteristic of the feature guiding template based on at least i) a simulated or modeled placement error and/or a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and ii) a function of geometry of the feature guiding template, the function of geometry comprising a ratio between a variable representing a dimension of the bottleneck and a variable representing a value of a dimension in a direction across at least one of the portions; and

producing electronic data, based on the characteristic, representing the feature guiding template,

wherein the electronic data is provided for manufacturing the tangible form of the feature guiding template to guide self-assembly of block copolymer.

2. The method of claim 1, wherein the haracteristic comprises one or more selected from;

height, shape, feature spacing, material, side wall angle and/or surface chemistry.

3. The method of claim 1, wherein the at least two features comprise one or more selected from:

a contact hole, an isolation trench, a via, a lead, a mask cut line, and/or a gate electrode.

4. The method of claim 1, wherein determining the characteristic is further based on one or more selected from:

chemical composition of at least one polymer of the block copolymer, structure of the block copolymer, thickness of the block copolymer, annealing temperature of the block copolymer, annealing rate of the block copolymer, and/or a solvent for the block copolymer.

5. The method of claim 1, wherein the variable representing a dimension of the bottleneck is a width of the bottleneck and the variable representing a value of a dimension in a direction across at least one of the portions is a width of the at least one of the portions.

6. The method of claim 5, wherein the ratio is a ratio of the width of the bottleneck to the width of at least one of the portions.

7. The method of claim 6, wherein the ratio is not greater than 0.5.

8. The method of claim 6, wherein the ratio is not smaller than 0.3.

9. The method of claim 1, wherein the joint protrudes from the at least two portions and the dimension of the bottleneck is at a position on the joint outside of the at least two portions.

10. The method of claim 1, wherein the determining the characteristic of the feature guiding template is based on at least a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and the function of geometry of the feature guiding template.

11. A method of determining a characteristic of a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout, the method comprising:

determining a guiding template for each of the at least two features without accounting for the one or more others of the at least two features, wherein the feature guiding template comprises a joint between at least two of the guiding templates;

determining a characteristic of the feature guiding template based on at least i) a simulated or modeled placement error and/or a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and ii) function of a ratio between a variable representing a value of a dimension of the joint and a variable representing a value of a dimension in a direction across at least one of the guiding templates; and

producing electronic data, based on the characteristic, representing the feature guiding template,

wherein the electronic data is provided for manufacturing a tangible form of the feature guiding template to guide self-assembly of block copolymer.

12. The method of claim 11, wherein the feature guiding template comprises at least two portions joined by a bottleneck.

13. The method of claim 11, wherein the variable representing a value of a dimension in a direction across at least one of the guiding templates comprises a width of the at least one of the guiding templates and/or the variable representing a value of a dimension of the joint comprises a width of a bottleneck at the joint.

14. The method of claim 11, wherein the variable representing a dimension of the joint is a width of the joint and the variable representing a value of a dimension in a direction across at least one of the portions is a width of the at least one of the portions.

15. The method of claim 11, wherein the joint protrudes from the at least two guiding templates and the dimension of the bottleneck is at a position on the joint outside of the at least two guiding templates.

16. The method of claim 11, wherein the determining the characteristic of the feature guiding template is based on at least a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and the function of a ratio between a variable representing a value of a dimension of the joint and a variable representing a value of a dimension in a direction across at least one of the guiding templates.

17. A method, comprising:

designing a geometric characteristic of a feature guiding template based on at least i) a simulated or modeled placement error and/or a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and ii) a function of geometry of the feature guiding template, the feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout and comprising at least two portions joined by a bottleneck and the function of geometry including a ratio between a variable representing a value of a dimension of the bottleneck and a variable representing a value of a dimension in a direction across at least one of the at least two portions; and

manufacturing a tangible form of the feature guiding template having the geometric characteristic.

18. The method of claim 17, wherein the characteristic comprises one or more selected from:

height, shape, sidewall angle and/or feature spacing.

19. The method of claim 17, wherein the at least two features comprise one or more selected from a contact hole, an isolation trench, a via, a lead, a mask cut line and/or a gate electrode.

20. The method of claim 17, wherein designing the characteristic is further based on one or more selected from:

chemical composition of at least one polymer of the block copolymer, structure of the block copolymer, thickness of the block copolymer, annealing temperature of the block copolymer, annealing rate of the block copolymer, and/or a solvent for the block copolymer.

21. The method of claim 17, wherein the variable representing a value of a dimension in a direction across at least one of the at least two portions comprises a width of the at least one of the portions and/or the variable representing a value of a dimension of the bottleneck comprises a width of the bottleneck.

22. The method of claim 17, wherein the variable representing a dimension of the bottleneck is a width of the bottleneck and the variable representing a value of a dimension in a direction across at least one of the portions is a width of the at least one of the portions.

23. The method of claim 22, wherein the ratio is a ratio of the width of the bottleneck to the width of at least one of the portions.

24. The method of claim 23, wherein the ratio is not greater than 0.5.

25. The method of claim 23, wherein the ratio is not smaller than 0.3.

26. The method of claim 23, wherein the ratio is selected from 0.48 to 0.52.

27. The method of claim 17, wherein the bottleneck protrudes from the at least two portions and the dimension of the bottleneck is at a position on the bottleneck outside of the at least two portions.

28. The method of claim 17, wherein the designing the geometric characteristic of a feature guiding template is based on at least a function of wavelength and numerical aperture of a lithography process for forming a tangible form of the feature guiding template, and the function of geometry of the feature guiding template.