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Methods and apparatus for obtaining diagnostic information relating to an industrial process

  • US 10,642,162 B2
  • Filed: 03/13/2019
  • Issued: 05/05/2020
  • Est. Priority Date: 10/02/2013
  • Status: Active Grant
First Claim
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1. A method comprising:

  • obtaining object data for a set of physical product units that have been subjected nominally to a same device manufacturing process;

    obtaining context data representing all or part of the processing history of each product unit of the set of product units;

    decomposing, by a hardware computer system, the object data into one or more fingerprint components; and

    diagnosing, by the hardware computer system, the device manufacturing process based on the context data and the one or more obtained fingerprint components.

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