Scanning exposure device, manufacturing method of scanning exposure device and control method of scanning exposure device
First Claim
1. A scanning exposure device comprising:
- a first light source configured to emit a first beam;
a second light source configured to emit a second beam;
a polygon mirror having N reflecting surfaces for reflecting the first beam and the second beam;
a first scanning optical system configured to focus the first beam, which is reflected by the polygon mirror, on a first image surface;
a second scanning optical system configured to focus the second beam, which is reflected by the polygon mirror, on a second image surface;
a first optical sensor configured to detect the first beam reflected by the polygon mirror;
a second optical sensor configured to detect the second beam reflected by the polygon mirror; and
a controller storing reference surface identifiers that respectively specify the reflecting surfaces of the polygon mirror and storing first writing time, which is a time until which the first image surface is started to be exposed by the first beam after the first beam is detected by the first optical sensor, and second writing time, which is a time until which the second image surface is started to be exposed by the second beam after the first beam is detected by the first optical sensor, for each of the reference surface identifiers,wherein the controller is configured to;
acquire a first timing at which the first optical sensor detects the first beam and a second timing at which the second optical sensor detects the second beam for each of the reflecting surfaces when the polygon mirror is rotated at a constant speed and the first beam and the second beam are reflected by each of the reflecting surfaces, the respective reflecting surfaces being identified by respective acquisition surface identifiers; and
specify a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers based on the first timing and the second timing by selecting a correspondence pattern among N correspondence patterns from a first correspondence pattern to a Nth correspondence pattern, the first correspondence pattern being one correspondence pattern in which the respective reference surface identifiers and the respective acquisition surface identifiers are associated, and each of a second correspondence pattern to the Nth correspondence pattern of the N correspondence patterns being a correspondence pattern in which each of the reference surface identifiers or each of the acquisition surface identifiers is deviated from the one correspondence pattern by 1 to N−
1.
1 Assignment
0 Petitions
Accused Products
Abstract
A scanning exposure device including: a first and a second light sources emitting a first and second beam, respectively; a polygon mirror having reflecting surfaces; a first and a second optical sensors detecting the first and the second beam, respectively; and a controller storing first writing time until which an exposure by the first beam starts after the first beam is detected and second writing time until which an exposure by the second beam starts after the first beam is detected, for respective reference surface identifiers specifying the respective reflecting surfaces, and the controller acquires a first timing at which the first beam is detected and a second timing at which the second beam is detected for the respective reflecting surfaces identified by respective acquisition surface identifiers; and specifies a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers.
3 Citations
13 Claims
-
1. A scanning exposure device comprising:
-
a first light source configured to emit a first beam; a second light source configured to emit a second beam; a polygon mirror having N reflecting surfaces for reflecting the first beam and the second beam; a first scanning optical system configured to focus the first beam, which is reflected by the polygon mirror, on a first image surface; a second scanning optical system configured to focus the second beam, which is reflected by the polygon mirror, on a second image surface; a first optical sensor configured to detect the first beam reflected by the polygon mirror; a second optical sensor configured to detect the second beam reflected by the polygon mirror; and a controller storing reference surface identifiers that respectively specify the reflecting surfaces of the polygon mirror and storing first writing time, which is a time until which the first image surface is started to be exposed by the first beam after the first beam is detected by the first optical sensor, and second writing time, which is a time until which the second image surface is started to be exposed by the second beam after the first beam is detected by the first optical sensor, for each of the reference surface identifiers, wherein the controller is configured to; acquire a first timing at which the first optical sensor detects the first beam and a second timing at which the second optical sensor detects the second beam for each of the reflecting surfaces when the polygon mirror is rotated at a constant speed and the first beam and the second beam are reflected by each of the reflecting surfaces, the respective reflecting surfaces being identified by respective acquisition surface identifiers; and specify a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers based on the first timing and the second timing by selecting a correspondence pattern among N correspondence patterns from a first correspondence pattern to a Nth correspondence pattern, the first correspondence pattern being one correspondence pattern in which the respective reference surface identifiers and the respective acquisition surface identifiers are associated, and each of a second correspondence pattern to the Nth correspondence pattern of the N correspondence patterns being a correspondence pattern in which each of the reference surface identifiers or each of the acquisition surface identifiers is deviated from the one correspondence pattern by 1 to N−
1. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A control method of a scanning exposure device, the scanning exposure device comprising:
-
a first light source configured to emit a first beam; a second light source configured to emit a second beam; a polygon mirror having N reflecting surfaces for reflecting the first beam and the second beam; a first scanning optical system configured to focus the first beam, which is reflected by the polygon mirror, on a first image surface; a second scanning optical system configured to focus the second beam, which is reflected by the polygon mirror, on a second image surface; a first optical sensor configured to detect the first beam reflected by the polygon mirror; a second optical sensor configured to detect the second beam reflected by the polygon mirror; and a storage in which reference surface identifiers that respectively specify the reflecting surfaces of the polygon mirror are stored, and in which first writing time, which is time until which the first image surface is started to be exposed by the first beam after the first beam is detected by the first optical sensor, and second writing time, which is time until which the second image surface is started to be exposed by the second beam after the first beam is detected by the first optical sensor, are stored for each of the reference surface identifiers, wherein the control method comprises; acquiring a first timing, at which the first optical sensor detects the first beam, and a second timing, at which the second optical sensor detects the second beam, when the polygon mirror is rotated at a constant speed and the first beam and the second beam are reflected by each of the reflecting surfaces of the polygon mirror, the respective reflecting surfaces being identified by respective acquisition surface identifiers; and specifying a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers based on the first timing and the second timing by selecting a correspondence pattern among N correspondence patterns from a first correspondence pattern to a Nth correspondence pattern, the first correspondence pattern being one correspondence pattern in which the respective reference surface identifiers and the respective acquisition surface identifiers are associated, and each of a second correspondence pattern to the Nth correspondence pattern of the N correspondence patterns being a correspondence pattern in which each of the reference surface identifiers or each of the acquisition surface identifiers is deviated from the one correspondence pattern by 1 to N−
1.
-
-
12. A scanning exposure device comprising:
-
a first light source configured to emit a first beam; a second light source configured to emit a second beam; a polygon mirror having N reflecting surfaces for reflecting the first beam and the second beam; a first scanning optical system configured to focus the first beam, which is reflected by the polygon mirror, on a first image surface; a second scanning optical system configured to focus the second beam, which is reflected by the polygon mirror, on a second image surface; a first optical sensor configured to detect the first beam reflected by the polygon mirror; a second optical sensor configured to detect the second beam reflected by the polygon mirror; and a controller having a storage storing; reference surface identifiers that respectively specify the reflecting surfaces of the polygon mirror; first writing time, which is time until which the first image surface is started to be exposed by the first beam after the first beam is detected by the first optical sensor, for each of the reference surface identifiers; second writing time, which is time until which the second image surface is started to be exposed by the second beam after the first beam is detected by the first optical sensor, for each of the reference surface identifiers; and a reference time difference between a timing at which the first optical sensor detects the first beam and a timing at which the second optical sensor detects the second beam for each of the reference surface identifiers, wherein the first writing time, the second writing time, and the reference time difference are stored in the storage for each of the reference surface identifiers during manufacturing of the scanning exposure device, and wherein the controller is configured to; acquire an acquisition time difference between a first timing at which the first optical sensor detects the first beam and a second timing at which the second optical sensor detects the second beam for each of the reflecting surfaces when the polygon mirror is rotated at a constant speed and the first beam and the second beam are reflected by each of the reflecting surfaces, the respective reflecting surfaces being identified by respective acquisition surface identifiers; and specify a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers based on a comparison between the reference time difference and the acquisition time difference. - View Dependent Claims (13)
-
Specification