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Load lock system for charged particle beam imaging

  • US 10,643,818 B2
  • Filed: 01/07/2019
  • Issued: 05/05/2020
  • Est. Priority Date: 02/23/2017
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a holder configured to hold a sample;

    a particle shielding plate disposed above the holder; and

    a position detecting unit including an emitter configured to project a light beam toward the holder,wherein the particle shielding plate includes an opening corresponding to the position detecting unit.

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