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Plasma generating apparatus, plasma processing apparatus, and method of controlling plasma generating apparatus

  • US 10,643,824 B2
  • Filed: 09/25/2017
  • Issued: 05/05/2020
  • Est. Priority Date: 10/03/2016
  • Status: Active Grant
First Claim
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1. A plasma generating apparatus comprising:

  • a high frequency power supply that generates a high frequency power;

    a plasma generation electrode connected to the high frequency power supply and formed by a hollow tube in which cooling water is distributed;

    a conductivity meter that measures conductivity of the cooling water inside the plasma generation electrode; and

    a controller that controls output of the high frequency power supply based on the conductivity of the cooling water measured by the conductivity meter such that a state of plasma generated by the plasma generation electrode is maintained while the conductivity of the cooling water inside the plasma generation electrode varies.

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