Methods for thermally calibrating reaction chambers

• US 10,643,826 B2
• Filed: 10/06/2017
• Issued: 05/05/2020
• Est. Priority Date: 10/26/2016
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holdings B.V.
• Inventors: Kim, Hyeongeu, Jacobs, Loren, Westrom, Peter
• Primary Examiner(s): Ngon, Ricky
• Application Number:
  US15/727,432
• Publication Number:
  US 20180114680A1
• Time in Patent Office: 942 Days
• Field of Search: 702 99
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: G01J 5/0044 Furnaces, ovens, kilns G01J5/0007, G01J5/004 take precedence
• CPC Class Codes: G01J 5/80 Calibration using comparison with reference sources G01J5/52
• CPC Class Codes: G01K 15/005 Calibration
• CPC Class Codes: H01J 37/32954 Electron temperature measurement

Abstract

Methods for thermally calibrating reaction chambers are provided. In some embodiments, methods may include calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor and applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor. Embodiments may also include calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor and applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor.

Claims

1. A method for thermally calibrating a reaction chamber comprising:

calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor;

applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor;

calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor;

applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor;

transferring the first calibrated non-contact type temperature sensor to a second reaction chamber;

calculating a second correction factor of a second contact type temperature sensor within the second reaction chamber utilizing the first calibrated non-contact type temperature sensor; and

applying the second correction factor to a second temperature controller to provide a second calibrated contact type temperature sensor.

2. The method of claim 1, wherein calculating the first correction factor of the first contact type temperature sensor within the first reaction chamber utilizing the first temperature sensor further comprises:

comparing a temperature measurement sensed by the first contact type temperature sensor to a temperature measurement sensed by the first temperature sensor; and

calculating the first correction factor based on the comparison.

3. The method of claim 2, wherein, comparing a temperature measurement sensed by the first contact type temperature sensor to a temperature measurement sensed by the first temperature sensor is performed simultaneously.

4. The method of claim 1, further comprising, selecting the first temperature sensor to comprise an instrumented wafer.

5. The method of claim 1, further comprising, selecting the first contact type temperature sensor and second contact type temperature sensor to comprise a thermocouple.

6. The method of claim 1, further comprising, selecting the first temperature controller and second temperature controller to comprise a PID controller.

7. The method of claim 1, further comprising, selecting the first non-contact type temperature sensor and second non-contact type temperature sensor to comprise a pyrometer.

8. The method of claim 1, wherein calculating the first calibration factor of the first non-contact type temperature sensor comprises:

comparing a temperature measurement sensed by the first non-contact type temperature sensor to a temperature measurement sensed by the first calibrated contact type sensor; and

calculating the first calibration factor based on the comparison.

9. The method of claim 1, wherein calculating the second correction factor of the second contact type temperature sensor further comprises:

comparing a temperature measurement sensed by the first calibrated non-contact type temperature sensor to a temperature measurement sensed by the second contact type sensor; and

calculating the second correction factor based on the comparison.

10. The method of claim 1, wherein the temperature offset between the first reaction chamber and the second reaction chamber is less than 2°

C.

11. The method of claim 1, further comprising:

calculating a second calibration factor of a second non-contact type temperature sensor within the second reaction chamber utilizing the second contact type temperature sensor; and

applying the second calibration factor to the second non-contact type temperature sensor to provide a second calibrated non-contact type temperature sensor.

12. The method of claim 1, further comprising, transferring the first calibrated non-contact type temperature sensor to a third reaction chamber.

13. A method for thermally calibrating a reaction chamber comprising:

calculating and applying a first correction factor to a first temperature controller associated with a first reaction chamber by comparing a temperature sensed by a first thermocouple within the first reaction chamber and a temperature sensed by an instrumented wafer within the first reaction chamber;

calculating and applying a first calibration factor to a first pyrometer within the first reaction chamber by comparing a temperature sensed by the first thermocouple and a temperature sensed by the first pyrometer;

transferring the first pyrometer to a second reaction chamber; and

calculating and applying a second correction factor to a second temperature controller associated with the second reaction chamber by comparing a temperature sensed by a second thermocouple within the second reaction chamber and a temperature sensed by the first pyrometer.

14. The method of claim 13, further comprising, calculating and applying the second calibration factor to a second pyrometer within the second reaction chamber by comparing a temperature sensed by the second thermocouple and a temperature sensed by the second pyrometer.

15. The method of claim 13, wherein comparing the temperature sensed by the first thermocouple within the first reaction to the temperature sensed by the instrumented wafer within the first reaction chamber is performed simultaneously.

16. The method of claim 13, wherein the temperature offset between the first reaction chamber and the second reaction chamber is less than approximately 2°

C.

17. The method of claim 13, wherein the first reaction chamber and the second reaction chamber comprise a quartz material.

18. The method of claim 13, further comprising, transferring the first pyrometer to a third reaction chamber.

19. The method of claim 13, wherein the difference between the first correction factor and the second correction factor is less than 3°

C.