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Methods for thermally calibrating reaction chambers

  • US 10,643,826 B2
  • Filed: 10/06/2017
  • Issued: 05/05/2020
  • Est. Priority Date: 10/26/2016
  • Status: Active Grant
First Claim
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1. A method for thermally calibrating a reaction chamber comprising:

  • calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor;

    applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor;

    calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor;

    applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor;

    transferring the first calibrated non-contact type temperature sensor to a second reaction chamber;

    calculating a second correction factor of a second contact type temperature sensor within the second reaction chamber utilizing the first calibrated non-contact type temperature sensor; and

    applying the second correction factor to a second temperature controller to provide a second calibrated contact type temperature sensor.

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