Vacuum processing apparatus and mass spectrometer
First Claim
1. A vacuum processing apparatus comprising:
- a vacuum chamber;
a stage disposed inside the vacuum chamber, on which an object to be processed is placed;
an internal guide rail laid in the vacuum chamber to guide the stage;
a through-hole made in a sidewall of the vacuum chamber;
a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber;
a movable member connected to the other end of the connecting rod;
a driving mechanism disposed outside the vacuum chamber to move the movable member; and
a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, whereinthe internal guide rail includes;
a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and
a second internal guide rail laid along a second direction crossing the first direction, andthe driving mechanism includes;
a first driving mechanism that moves the movable member along the first direction; and
a second driving mechanism that moves the movable member along the second direction.
1 Assignment
0 Petitions
Accused Products
Abstract
A vacuum processing apparatus 100 includes: a vacuum chamber 1; a stage 2 placed inside the vacuum chamber 1, on which an object to be processed is placed; an internal guide rail 31 laid in the vacuum chamber 1 to guide the stage 2; a through-hole 103 made in a sidewall 102 of the vacuum chamber 1; a connecting rod 4 coupled to the stage 2 at one end and inserted in the through-hole 103, the other end being disposed outside the vacuum chamber 1; a movable member 5 connected to the other end of the connecting rod 4; a driving mechanism 8 disposed outside the vacuum chamber 1 to move the movable member 5; and a bellows 6 disposed between the movable member 5 and the sidewall 102, the bellows 6 following the movement of the movable member 5 while maintaining airtightness of the vacuum chamber 1.
2 Citations
8 Claims
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1. A vacuum processing apparatus comprising:
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a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, wherein the internal guide rail includes; a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and a second internal guide rail laid along a second direction crossing the first direction, and the driving mechanism includes; a first driving mechanism that moves the movable member along the first direction; and a second driving mechanism that moves the movable member along the second direction. - View Dependent Claims (2, 3, 4)
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5. A mass spectrometer comprising:
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a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, wherein the internal guide rail includes; a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and a second internal guide rail laid along a second direction crossing the first direction, and the driving mechanism includes; a first driving mechanism that moves the movable member along the first direction; and a second driving mechanism that moves the movable member along the second direction. - View Dependent Claims (6, 7, 8)
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Specification