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Vacuum processing apparatus and mass spectrometer

  • US 10,643,831 B2
  • Filed: 11/20/2015
  • Issued: 05/05/2020
  • Est. Priority Date: 11/20/2015
  • Status: Active Grant
First Claim
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1. A vacuum processing apparatus comprising:

  • a vacuum chamber;

    a stage disposed inside the vacuum chamber, on which an object to be processed is placed;

    an internal guide rail laid in the vacuum chamber to guide the stage;

    a through-hole made in a sidewall of the vacuum chamber;

    a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber;

    a movable member connected to the other end of the connecting rod;

    a driving mechanism disposed outside the vacuum chamber to move the movable member; and

    a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, whereinthe internal guide rail includes;

    a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and

    a second internal guide rail laid along a second direction crossing the first direction, andthe driving mechanism includes;

    a first driving mechanism that moves the movable member along the first direction; and

    a second driving mechanism that moves the movable member along the second direction.

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