Apparatus for processing substrate

• US 10,643,868 B2
• Filed: 11/15/2016
• Issued: 05/05/2020
• Est. Priority Date: 12/21/2015
• Status: Active Grant

• Current Assignee: NPS Corporation
• Original Assignee: NPS Corporation
• Inventors: Nam, Won Sik, Yeon, Kang Heum, Song, Dae Seok
• Primary Examiner(s): Chen, Keath T
• Application Number:
  US15/352,572
• Publication Number:
  US 20170175264A1
• Time in Patent Office: 1,267 Days
• Field of Search: 118728, 118718
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67757 vertical transfer of a batch of workpieces

Abstract

The present invention relates to a substrate processing apparatus, comprising, a chamber comprising a base frame formed to open at least a part of faces extending in vertical direction and horizontal direction, a main heat source provided in a row with isolation on an opened face of the base frame, and a block which is connected to the opened face of the base frame and forms a space in the base frame in which the substrate is processed; and a substrate support portion which is provided in the chamber and supports the substrate, and by integrating the chamber and the heat source, the size of the chamber itself is reduced, the space can be used efficiently with reduced installation space, and facilities cost can be saved.

Claims

1. A substrate processing apparatus, comprising:

a chamber having a space to process the substrate therein; and

a substrate support portion provided in the chamber and configured to support the substrate;

wherein the chamber comprises;

an upper frame with a shape of polygon frame,

a lower frame with a shape corresponding to the upper frame,

a plurality of side frames comprising two vertical frames connecting each of both end portions of the upper frame and the lower frame and extending longitudinally with being faced with each other and two horizontal frames connecting the two vertical frames with each other and extending horizontally,

an upper block connected to the upper frame to form the space for processing the substrate, the upper block having an opening,

a lower block connected to the lower frame to form the space for processing the substrate, a plurality of side blocks connected to the side frames to form the space to process the substrate,

a plurality of light-transmitting tubes provided across the side frames, and

a plurality of main heat sources inserted into corresponding ones of the plurality of light-transmitting tubes,

the apparatus further comprising an auxiliary heat source unit which comprises;

a supporting plate connected with the opening of the upper block,

a plurality of light-transmitting tubes connected with the supporting plate and the lower block in a direction crossing with the plurality of main heat sources and provided to surround the substrate supporting portion, and

a plurality of auxiliary heat sources which are inserted into corresponding ones of the plurality of light-transmitting tubes connected with the supporting plate and the lower block,

wherein the substrate support portion can support the substrate in the form of a roll such that the substrate support portion is surrounded by the substrate,

wherein the plurality of auxiliary heat sources are disposed between the plurality of main heat sources and the substrate support portion to surround the substrate support portion and heat the whole area of the substrate at the same distance, and

wherein fixing holes are radially formed in each of the supporting plate and the lower block to fix the plurality of light-transmitting tubes for inserting the plurality of auxiliary heat sources;

wherein the substrate support portion comprises a substrate support stanchion supporting the substrate, the substrate support stanchion comprising;

at least one fixing member which is connected to an upper plate and a lower plate and fixes the substrate to enclose a body, wherein the at least one fixing member comprises;

at least one fixing rod which connects the upper plate and the lower plate to each other, wherein fixing holes, isolated along a longitudinal direction of the at least one fixing rod, are formed within the at least one fixing rod, and

a fixing pin which is inserted into the fixing holes and fixes the other side of the substrate.

2. A substrate processing apparatus according to claim 1, wherein, the supporting plate is provided with an inflow hole for gas to flow in the chamber.

3. A substrate processing apparatus according to claim 1, wherein,

the lower block is connected to a bottom portion of the lower frame, and

a through hole is formed at a center portion of the lower frame to connect to a gate which supports the substrate support portion and is opened and closed when the substrate is imported and exported.

4. A substrate processing apparatus according to claim 1, wherein one or more of the plurality of main heat sources is provided to cut across inside of one or more of the plurality of side frames.

5. A substrate processing apparatus according to claim 4, wherein,

the plurality of main heat sources are provided at a different height from each other to a one or more of the plurality of main heat sources provided on a neighboring side frame of the plurality of side frames, each of the plurality of main heat source comprise a lamp emitting radiation light upon applying power or a heating element generating heat upon applying power,

wherein the plurality of main heat sources are provided at a different height from each other to a main heat source provided on a neighboring side frame.

6. A substrate processing apparatus according to claim 5, the substrate support portion further comprising:

a stand on one side of which the substrate support stanchion is received,

a support shaft which is provided as passing through a gate and supports the stand in the chamber being connected to the other side of the stand, and

an actuator which is provided outside of the chamber and rotates the support shaft.

7. A substrate processing apparatus according to claim 6, the substrate support stanchion further comprising:

an inflow hole for gas to be flowed in formed on the upper plate,

an outflow hole for gas to be discharged is formed on the lower plate,

wherein the lower plate is arranged as being isolated from the upper plate, and

wherein the body comprises a rod which connects the upper plate and the lower plate each other.

8. A substrate processing apparatus according to claim 7, the at least one fixing member comprising:

a first fixing member which is arranged substantially parallel to the rod and both ends of which is fixed to an outer side of the upper plate and the lower plate each, and

a second fixing member which is provided with isolation to the first fixing member and both ends of which is fixed to an outer side of the upper plate and the lower plate each.

9. A substrate processing apparatus according to claim 8, the first fixing member comprising:

a pair of second fixing rods, and

an isolation member provided between the pair of second fixing rods,

wherein a gap being formed between the pair of second fixing rods into which one side of the substrate is inserted.

10. A substrate processing apparatus according to claim 9, the second fixing member comprising:

a third fixing rod in which the plurality of fixing holes are formed.

11. A substrate processing apparatus according to claim 10, wherein,

the second fixing member is connected to be able to move along at least a part of a circumferential direction of the upper plate and the lower plate.

12. A substrate processing apparatus according to claim 6, the substrate support stanchion further comprising:

an inflow hole for gas to be flowed in formed on the upper plate,

an outflow hole for gas to be discharged is formed on the lower plate, and

wherein the body comprises a rod which connects the upper plate and the lower plate each other and on which a slit is formed for one side of the substrate to be inserted along longitudinal direction.

13. A substrate processing apparatus according to claim 12, wherein,

the rod is connected to either one of the upper plate and the lower plate to be able to be rotated.

14. A substrate processing apparatus according to claim 13, wherein,

the at least one fixing member is connected to be able to move along at least a part of a circumferential direction of the upper plate and the lower plate.

15. A substrate processing apparatus according to claim 14, wherein,

a discharge hole for gas to be discharged is formed on the stand.