Removable compartments for workpiece stocker
First Claim
1. A method for improving the operation of a workpiece stocker having a storage chamber and an IO station, the method comprisingstoring a plurality of workpieces in the storage chamber, wherein the storage chamber is compartmentalized into a plurality of compartments, wherein the plurality of compartments are open during normal operation;
- providing a robotic mechanism to transfer the plurality of workpieces from the storage chamber to the IO station through an IO station opening;
emergency accessing each stationary storage chamber location of each of the plurality of compartments disposed in the workpiece stocker, through an emergency access port separate and distinct from each of the IO station opening and disposed on each exterior wall of the storage chamber, wherein both the IO station opening and the emergency access port extend through and are defined by a common housing forming the storage chamber distinct from the plurality of compartments, so that in an event of a failure of the workpiece stocker the emergency access port provides emergency access to each stationary storage chamber location of each of the plurality of compartments and removal of at least one compartment of the plurality of compartments from a corresponding stationary storage location of the storage chamber independent of each of the IO station opening;
assessing that the failure of the workpiece stocker occurs; and
sealing each of the plurality of compartments disposed within the storage chamber before accessing the workpiece stocker, based on an assessment that failure of the workpiece stocker has occurred, to prevent contamination, wherein the workpiece stocker is accessed through the emergency access port.
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Accused Products
Abstract
The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.
63 Citations
23 Claims
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1. A method for improving the operation of a workpiece stocker having a storage chamber and an IO station, the method comprising
storing a plurality of workpieces in the storage chamber, wherein the storage chamber is compartmentalized into a plurality of compartments, wherein the plurality of compartments are open during normal operation; -
providing a robotic mechanism to transfer the plurality of workpieces from the storage chamber to the IO station through an IO station opening; emergency accessing each stationary storage chamber location of each of the plurality of compartments disposed in the workpiece stocker, through an emergency access port separate and distinct from each of the IO station opening and disposed on each exterior wall of the storage chamber, wherein both the IO station opening and the emergency access port extend through and are defined by a common housing forming the storage chamber distinct from the plurality of compartments, so that in an event of a failure of the workpiece stocker the emergency access port provides emergency access to each stationary storage chamber location of each of the plurality of compartments and removal of at least one compartment of the plurality of compartments from a corresponding stationary storage location of the storage chamber independent of each of the IO station opening; assessing that the failure of the workpiece stocker occurs; and sealing each of the plurality of compartments disposed within the storage chamber before accessing the workpiece stocker, based on an assessment that failure of the workpiece stocker has occurred, to prevent contamination, wherein the workpiece stocker is accessed through the emergency access port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for improving the operation of a workpiece stocker having a storage chamber, an IO station having an IO station opening, and a robotic mechanism, the method comprising:
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storing a plurality of semiconductor workpieces in the storage chamber, wherein each of the plurality of semiconductor workpieces are stored bare in the storage chamber; providing a robotic mechanism to transfer the plurality of semiconductor workpieces from the storage chamber to the IO station through the IO station opening; emergency accessing each stationary storage chamber location for each of the plurality of semiconductor workpieces stored in the workpiece stocker, through an emergency access port separate and distinct from each of the IO station opening and disposed on each exterior wall of the storage chamber, wherein both the IO station opening and the emergency access port extend through and are defined by a common housing forming the storage chamber, so that in an event of a failure of the workpiece stocker the emergency access port provides emergency access to each stationary storage chamber location for each of the plurality of semiconductor workpieces and removal of at least one semiconductor workpiece of the plurality of semiconductor workpieces from a corresponding stationary storage location of the storage chamber independent of each of the IO station opening; assessing that the failure of the workpiece stocker occurs; and sealing the storage chamber at each stationary storage chamber location for each of the plurality of semiconductor workpieces before accessing the workpiece stocker, based on an assessment that failure of the workpiece stocker has occurred, to prevent contamination, wherein the workpiece stocker is accessed through the emergency access port. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method for improving the operation of a workpiece stocker having a storage chamber, an IO station, and a robotic mechanism, the method comprising
storing a plurality of semiconductor workpieces in the storage chamber, wherein each of the plurality of semiconductor workpieces is stored bare in the storage chamber; -
providing a robotic mechanism based within the storage chamber to transfer the plurality of semiconductor workpieces from the storage chamber to the IO station through an IO station opening, of the IO station; emergency accessing each stationary storage chamber location for each of the plurality of semiconductor workpieces stored in the workpiece stocker, through an emergency access port separate and distinct from each of the IO station opening and disposed on each exterior wall of the storage chamber, wherein both the IO station opening and the emergency access port extend through and are defined by a common housing forming the storage chamber, so that in an event of a failure of the workpiece stocker the emergency access port provides emergency access to each stationary storage chamber location for each of the plurality of semiconductor workpieces and removal of at least one semiconductor workpiece of the plurality of semiconductor workpieces from a corresponding stationary storage location of the storage chamber independent of each of the IO station opening; and sealing each stationary storage chamber location for each of the plurality of semiconductor workpieces stored in the storage chamber before accessing the workpiece stocker, based on an assessment that failure of the workpiece stocker has occurred, to prevent contamination, wherein the workpiece stocker is accessed through the emergency access port. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification