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Removable compartments for workpiece stocker

  • US 10,643,878 B2
  • Filed: 06/16/2014
  • Issued: 05/05/2020
  • Est. Priority Date: 11/15/2006
  • Status: Active Grant
First Claim
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1. A method for improving the operation of a workpiece stocker having a storage chamber and an IO station, the method comprisingstoring a plurality of workpieces in the storage chamber, wherein the storage chamber is compartmentalized into a plurality of compartments, wherein the plurality of compartments are open during normal operation;

  • providing a robotic mechanism to transfer the plurality of workpieces from the storage chamber to the IO station through an IO station opening;

    emergency accessing each stationary storage chamber location of each of the plurality of compartments disposed in the workpiece stocker, through an emergency access port separate and distinct from each of the IO station opening and disposed on each exterior wall of the storage chamber, wherein both the IO station opening and the emergency access port extend through and are defined by a common housing forming the storage chamber distinct from the plurality of compartments, so that in an event of a failure of the workpiece stocker the emergency access port provides emergency access to each stationary storage chamber location of each of the plurality of compartments and removal of at least one compartment of the plurality of compartments from a corresponding stationary storage location of the storage chamber independent of each of the IO station opening;

    assessing that the failure of the workpiece stocker occurs; and

    sealing each of the plurality of compartments disposed within the storage chamber before accessing the workpiece stocker, based on an assessment that failure of the workpiece stocker has occurred, to prevent contamination, wherein the workpiece stocker is accessed through the emergency access port.

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