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Transfer head for transferring micro element and transferring method of micro element

  • US 10,643,879 B2
  • Filed: 01/01/2018
  • Issued: 05/05/2020
  • Est. Priority Date: 09/30/2016
  • Status: Active Grant
First Claim
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1. A transfer head for transferring micro elements, comprising:

  • a cavity;

    a plurality of vacuum paths connected with the cavity respectively and including valves for opening or closing;

    a plurality of suction nozzles connected with the vacuum paths configured to hold or release the micro elements via vacuum pressure transmitted by each vacuum path; and

    a switching component for controlling the valves to open or close the vacuum paths, so as to control the suction nozzles to hold or release required micro elements via vacuum pressure;

    wherein the switching component comprises a CMOS memory circuit and an address electrode array connected to the CMOS memory circuit, wherein, each vacuum path valve corresponds to an address electrode in the array.

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