Transfer head for transferring micro element and transferring method of micro element

• US 10,643,879 B2
• Filed: 01/01/2018
• Issued: 05/05/2020
• Est. Priority Date: 09/30/2016
• Status: Active Grant

• Current Assignee: Xiamen San'An Optoelectronics Co.Ltd. (Sanan Optoelectronics Company Limited)
• Original Assignee: Xiamen Sanan Optoelectronics Technology Company Limited (Sanan Optoelectronics Company Limited)
• Inventors: Hsu, Chen-ke, Shao, Xiaojuan, Zheng, Jiansen, Shi, Junpeng, Lin, Kechuang
• Primary Examiner(s): Chin, Paul T
• Application Number:
  US15/859,729
• Publication Number:
  US 20180122683A1
• Time in Patent Office: 855 Days
• Field of Search: 294183, 294185
• CPC Class Codes: B25J 15/0625 provided with a valve
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 33/00 Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof H10K50/00 takes precedence; devices consisting of a plurality of semiconductor components formed in or on a common substrate and including semiconductor components having potential barriers, specially adapted for light emission H01L27/15; semiconductor lasers H01S5/00
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination

Abstract

A transfer head for transferring micro element includes a cavity; a plurality of vacuum paths connected with the cavity respectively with valves configured at the connection between the cavity and the vacuum paths and used for opening/closing; a plurality of suction nozzles connected with the vacuum paths, wherein the suction nozzles hold or release the micro element via vacuum pressure; vacuum pressure is transmitted by each vacuum path; a switching component for controlling valve to open/close each vacuum path, so as to control the suction nozzles to hold or release required micro element via vacuum pressure. Further, the switching component includes a CMOS memory circuit and an address electrode array connected to the CMOS memory circuit to realize micro-switch array. The transfer head can selectively transfer a plurality of micro elements at one time.

Claims

1. A transfer head for transferring micro elements, comprising:

a cavity;

a plurality of vacuum paths connected with the cavity respectively and including valves for opening or closing;

a plurality of suction nozzles connected with the vacuum paths configured to hold or release the micro elements via vacuum pressure transmitted by each vacuum path; and

a switching component for controlling the valves to open or close the vacuum paths, so as to control the suction nozzles to hold or release required micro elements via vacuum pressure;

wherein the switching component comprises a CMOS memory circuit and an address electrode array connected to the CMOS memory circuit, wherein, each vacuum path valve corresponds to an address electrode in the array.

2. The transfer head of claim 1, wherein the valve is a movable component;

the address electrode array is under selective excitation by the CMOS memory circuit with voltage potential to generate electrostatic attraction, through which, corresponding movable component can deflect or approach to corresponding address electrode, thus controlling the opening or closing of each vacuum path.

3. The transfer head of claim 2, wherein the movable components are under the address electrode array, and are separated from each other;

a space is between them so that the movable component can deflect or approach to corresponding address electrode under electrostatic attraction.

4. The transfer head of claim 3, wherein a space is formed between the address electrode and the movable component with a sacrificial layer so that the movable component can deflect or approach to corresponding address electrode under electrostatic attraction.

5. The transfer head of claim 2, further comprising a substrate with two opposite surfaces, wherein, the first surface is proximal to the cavity, and the second surface is distal from the cavity;

the vacuum paths are a series of micropores passing through the substrate, wherein, one end is connected to the cavity, and the other end is connected to the suction nozzles.

6. The transfer head of claim 5, wherein a connection part between the first surface of the substrate and the micropore has a third surface lower than the first surface;

the movable component is arranged over the first surface of the substrate, and crosses the micropore structure, wherein one end is in a corresponding position over the third surface of the substrate and is suspended, so that another end of the movable component can deflect towards the address electrode under electrostatic attraction to close or open corresponding vacuum path.

7. The transfer head of claim 6, wherein the connection position between the first surface of the substrate and the micropore has a step;

the step surface is lower than the first surface; and

the step has a same width as that of the micropore.

8. The transfer head of claim 5, wherein the movable component is arranged over the first surface of the substrate, wherein, at least one end is fixed on the first surface of the substrate, and extends towards the micropore to cover the opening of the micropore structure, and another end of the movable component deflects towards the address electrode under electrostatic attraction.

9. The transfer head of claim 8, wherein the first surface of the substrate is provided with a metal layer, and is fabricated to make a metal sheet structure as the movable component at corresponding position of the micropore of the substrate;

at least one end of the metal sheet is connected to the metal layer, and the other end is separated from the metal layer, which can deflect towards the address electrode under electrostatic attraction.

10. The transfer head of claim 8, wherein a first end of the movable component is fixed on the first surface of the substrate, and a diagonal second end of the movable component is under a corresponding address electrode, and can deflect towards the address electrode under electrostatic attraction.

11. The transfer of claim 8, wherein the movable component is fixed over the first surface of the substrate via a pivotal structure, and deflects towards a corresponding address electrode under electrostatic attraction taking this pivot as the center.

12. The transfer head of claim 5, wherein the substrate is a Si substrate, a ceramic substrate, a metal substrate, a sapphire substrate or a semiconductor material substrate.

13. The transfer head of claim 5, wherein the suction nozzles have a size below 100 μ

m.

14. The transfer head of claim 5, wherein the micropore structure is formed by laser boring, micro-perforation techniques, or wiring.

15. The transfer head of claim 5, wherein the suction nozzles are distributed in an array, wherein a space between suction nozzles is below 200 μ

m.

16. A transfer method for transferring micro elements, the method comprising:

(1) placing at least one micro element over a first substrate;

(2) using a transfer head of to orient and contact the micro element, wherein;

the transfer head comprises;

a cavity;

a plurality of vacuum paths connected with the cavity respectively and including valves for opening or closing;

a plurality of suction nozzles connected with the vacuum paths configured to hold or release the micro elements via vacuum pressure transmitted by each vacuum path; and

a switching component for controlling the valves to open or close the vacuum paths, so as to control the suction nozzles to hold or release required micro elements via vacuum pressure;

the suction nozzle holds the micro element via vacuum pressure, and controls each vacuum path valve via the switching component for controlling the opening or closing of the vacuum path so as to extract required micro element; and

(3) orienting the transfer head with extracted micro element towards the second substrate, wherein, the suction nozzle releases the micro element via vacuum pressure, and controls each vacuum path valve via the switching component for controlling the opening or closing of the vacuum path so as to release the extracted micro element over the second substrate.

17. The transfer method of claim 16, wherein:

a plurality of micro elements are provided;

in step (2), only a portion of the micro elements are held to extract required micro elements; and

in step (3), only a portion of the micro elements are desorbed to release required micro elements.

18. The transfer method of claim 16, wherein the first substrate is a growth substrate, or a carrier substrate.

19. The transfer method of claim 16, wherein the second substrate is an active element array substrate, or a passive element array substrate.