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Fluorine-containing conductive films

  • US 10,643,925 B2
  • Filed: 04/17/2014
  • Issued: 05/05/2020
  • Est. Priority Date: 04/17/2014
  • Status: Active Grant
First Claim
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1. A continuous fluoride thin film comprising TiF3 and TiN and having a resistivity of less than 106 μ

  • Ω

    cm.

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