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Dense arrays and charge storage devices

  • US 10,644,021 B2
  • Filed: 05/04/2018
  • Issued: 05/05/2020
  • Est. Priority Date: 08/14/2000
  • Status: Expired due to Term
First Claim
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1. An array of nonvolatile memory cells, comprising a monolithic three dimensional memory array that comprises N device levels that are vertically stacked and separated from each other, wherein N is an integer greater than 1;

  • wherein each device level of the N device levels includes a respective two-dimensional array of memory cells, and N two-dimensional arrays of memory cells are vertically stacked within the array; and

    wherein each memory cell comprises a semiconductor device and each memory cell size per bit is about (2f2)/N, where f is a minimum feature size.

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