Image sensor
First Claim
1. An image sensor comprising:
- a substrate comprising a plurality of pixels arranged in a two-dimensional array structure, and having a front side and a back side opposite to the front side;
an interconnection arranged on the front side of the substrate;
an insulating layer arranged on the back side of the substrate;
a pixel separation structure disposed in the substrate, wherein the pixel separation structure separates the plurality of pixels from each other and includes a conductive layer therein; and
a contact disposed on the back side of the substrate and electrically connected the conductive layer of the pixel separation structure.
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Accused Products
Abstract
A substrate includes a plurality of pixels arranged in a two-dimensional array structure and has a front side and a back side opposite to the front side. An interconnection is arranged on the front side of the substrate. An insulating layer, a color filter, and a micro-lens are arranged on the back side of the substrate. A pixel separation structure is disposed in the substrate. The pixel separation structure includes a conductive layer having a grid structure in a planar view of the image sensor and surrounds each of the plurality of pixels. A back side contact is vertically overlapped with and electrically connected to a grid point portion of the grid structure of the conductive layer of the pixel separation structure.
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Citations
20 Claims
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1. An image sensor comprising:
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a substrate comprising a plurality of pixels arranged in a two-dimensional array structure, and having a front side and a back side opposite to the front side; an interconnection arranged on the front side of the substrate; an insulating layer arranged on the back side of the substrate; a pixel separation structure disposed in the substrate, wherein the pixel separation structure separates the plurality of pixels from each other and includes a conductive layer therein; and a contact disposed on the back side of the substrate and electrically connected the conductive layer of the pixel separation structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An image sensor comprising:
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a plurality of pixels each comprising a photodiode and disposed in an array structure on a substrate, the substrate comprising a front side and a back side opposite to the front side; a pixel separation structure penetrating the substrate, wherein the pixel separation structure separates the plurality of pixels from each other and includes a conductive layer therein; and a plurality of contacts disposed on the back side of the substrate and electrically connected the conductive layer of the pixel separation structure. - View Dependent Claims (12, 13, 14, 15)
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16. An image sensor comprising:
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a substrate; a plurality of photodiodes disposed in an array structure on the substrate; a pixel separation structure penetrating the substrate, surrounding each of the plurality of photodiodes, separating the plurality of photodiodes from each other, and including a conductive layer therein; an interconnection arranged on the front side of the substrate and electrically connected to the conductive layer of the pixel separation structure; an insulating layer arranged on the back side of the substrate; and a plurality of contacts disposed on the back side of the substrate, penetrating the insulating layer, and electrically connected to the conductive layer of the pixel separation structure. - View Dependent Claims (17, 18, 19, 20)
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Specification