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Transistor array and manufacturing method thereof

  • US 10,644,063 B2
  • Filed: 12/12/2013
  • Issued: 05/05/2020
  • Est. Priority Date: 01/11/2013
  • Status: Active Grant
First Claim
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1. A piezoelectric array comprising a substrate and a plurality of piezoelectric elements sharing the substrate, each of the piezoelectric elements including:

  • an individual bottom electrode formed of a first material disposed on the substrate and a connection wire for the bottom electrode;

    a piezoelectric body disposed on the bottom electrode, wherein the piezoelectric body is made of piezoelectric material; and

    an individual top electrode formed of a second material disposed on the piezoelectric body,wherein the piezoelectric body of each piezoelectric element is configured to deform when the respective piezoelectric element deforms under stresses, strains, or pressures applied to the piezoelectric array, thereby producing a positive piezoelectric potential at one end and a negative piezoelectric potential at the other end within the piezoelectric body, and the produced piezoelectric potentials regulate or trigger carrier transport progress of the piezoelectric elements, wherein a diameter of the piezoelectric body of each piezoelectric element ranges from hundreds of nanometers to several microns, and each piezoelectric body includes one or more nanowires or nanorods.

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