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Counterbore pocket structure for fluidic assembly

  • US 10,644,190 B2
  • Filed: 01/01/2018
  • Issued: 05/05/2020
  • Est. Priority Date: 12/27/2011
  • Status: Active Grant
First Claim
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1. A fluidic assembly substrate comprising:

  • a substrate comprising a top surface and a bottom surface;

    a plurality of pocket structures extending from the substrate top surface into the substrate, wherein at least one of the pocket structures has a keyhole shape with a first portion overlying a through-hole and having a first diameter, and a second portion overlapping the first portion, the second portion having a crescent moon-shape with a second diameter, and wherein the second diameter is greater than the first diameter; and

    ,wherein the through-hole is formed between the at least one pocket structure and the substrate bottom surface.

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