Light-emitting device, light-emitting device package, and light-emitting module

• US 10,644,194 B2
• Filed: 04/14/2017
• Issued: 05/05/2020
• Est. Priority Date: 04/15/2016
• Status: Active Grant

• Current Assignee: Suzhou Lekin Semiconductor Company Limited
• Original Assignee: LG Innotek Company Limited (LG Corporation)
• Inventors: Kim, Myung Hee, Hong, Jung Yeop
• Primary Examiner(s): Enad, Christine A
• Application Number:
  US16/093,795
• Publication Number:
  US 20190140137A1
• Time in Patent Office: 1,117 Days
• CPC Class Codes: A61N 5/06 using light
• CPC Class Codes: H01L 25/0753 the devices being arranged next to each other
• CPC Class Codes: H01L 25/167 comprising optoelectronic devices, e.g. LED, photodiodes
• CPC Class Codes: H01L 33/04 with a quantum effect structure or superlattice, e.g. tunnel junction
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01L 33/38 with a particular shape
• CPC Class Codes: H01L 33/64 Heat extraction or cooling elements

Abstract

Disclosed in an embodiment are a light emitting device, and a light emitting device package and a light emitting module having the same. According to an embodiment, the light emitting device comprises: a first superlattice layer arranged on an AlN template layer, and a first semiconductor layer, a second superlattice layer, and a first conductive semiconductor layer; an active layer having a quantum well layer and a quantum wall layer arranged on the first conductive semiconductor layer; and an electron blocking layer arranged on the active layer and a second conductive semiconductor layer. A first and second layers of the first superlattice layer, the first semiconductor layer, and third and fourth layers of the second superlattice layer include AlGaN-based semiconductors, and an aluminum composition of the third layer is higher than an aluminum composition of the fourth layer and has the same composition range as that of an aluminum composition of the first semiconductor layer. The active layer emits ultraviolet light.

Claims

1. A light emitting device comprising:

an AlN template layer;

a first superlattice layer disposed on the AN template layer;

a second superlattice layer disposed on the first superlattice layer,

a first semiconductor layer disposed between the first and second superlattice layers;

a first conductive type semiconductor layer disposed on the second superlattice layer;

an active layer disposed on the first conductive type semiconductor layer and having a quantum well layer and a quantum wall layer;

an electron blocking layer disposed on the active layer; and

a second conductive type semiconductor layer disposed on the electron blocking layer,

wherein the first superlattice layer includes a first layer having an AlN semiconductor and a second layer having an AlGaN-based semiconductor,

the first semiconductor layer includes an AlGaN-based semiconductor,

the second superlattice layer includes a third layer having an AlGaN-based semiconductor and a fourth layer having an AlGaN-based semiconductor,

the first layer and the second layer are disposed alternately in the first superlattice layer,

the third layer and the fourth layer are disposed alternately in the second superlattice layer,

a composition of aluminum (Al) of each of the first semiconductor layer, the second layer and the third layer is equal to or greater than a composition of gallium (Ga),

wherein a difference between the composition of gallium and the composition of aluminum of each of the first semiconductor layer, the second layer and the third layer is 10% or less,

the first semiconductor layer has a thickness greater than a thickness of a single pair having the first layer and the second layer of the first superlattice layer, and

the active layer emits ultraviolet light,

wherein the composition of aluminum of the first semiconductor layer, the second layer and the third layer is 50% or more,

wherein the first semiconductor layer, the second layer and the third layer have a composition formula of Al_xGa_1-xN (0.5≤

x≤

0.6), and the fourth layer has a composition formula of Al_bGa_1-bN (0.45≤

b≤

0.55),

wherein the first conductive type semiconductor layer has a composition formula of AlxGa_1-zN (0.45≤

z≤

0.55),

the quantum well layer of the active layer is formed of an AlGaN-based semiconductor and the quantum wall layer is formed of an AlGaN-based semiconductor, and

the aluminum composition of the quantum wall layer is higher than that of the quantum well layer by 20% or more,

wherein the quantum well layer has a thickness of 25% or less of a thickness of the quantum wall layer, and

the active layer generates light of 295 nm to 315 nm,

wherein the electron blocking layer includes a plurality of barrier layers and a plurality of well layers,

the plurality of barrier layers include an AlGaN-based semiconductor,

the plurality of well layers include an AlGaN-based semiconductor,

each of the plurality of barrier layers has an aluminum composition higher than that of each of the plurality of well layers,

each of the plurality of barrier layers has an aluminum composition higher than that of the quantum wall layer of the active layer,

each of the plurality of well layers has an aluminum composition lower than that of the quantum wall layer of the active layer, and

the plurality of barrier layers include a first barrier layer on the active layer and a second barrier layer under the second conductive type semiconductor layer, wherein the plurality of well layers are disposed between the first and second barrier layers,

the plurality of barrier layers include a plurality of intermediate barrier layers disposed between the first and second barrier layers and the well layer, and

an aluminum composition of each of the intermediate barrier layers is higher than that of the first and second barrier layers.

2. The light emitting device of claim 1, wherein the first barrier layer has a composition formula of Al_pGa_1-pN (0.50≤

p≤

0.74),

the second barrier layer has a composition formula of Al_qGa_1-qN (0.50≤

q≤

0.74), and

the intermediate barrier layer has a composition formula of Al_rGa_1-rN (0.55≤

r≤

0.74).

3. The light emitting device of claim 1, wherein each of the first barrier layer, the second barrier layer, and the intermediate barrier layer is thicker than the well layer, and has a thickness of 3 nm to 10 nm, and

a surface roughness of the second conductive type semiconductor layer is 1 nm or less.

4. The light emitting device of claim 1, wherein the plurality of well layers include a first well layer disposed between the first barrier layer and the intermediate barrier layer, a second well layer disposed between the intermediate barrier layers and a third well layer between the intermediate barrier layer and the second barrier layer,

the first well layer has a composition formula of Al_eGa_1-eN (0.24≤

e≤

0.45),

the second well layer has a composition formula of Al_f Ga_1-f N (0.24≤

f≤

0.48),

the third well layer has a composition formula of Al_gGa_1-gN (0.24≤

g≤

0.48),

the second conductive type semiconductor layer includes a first conductive semiconductor layer on the electron blocking layer and a second conductive semiconductor layer on the first conductive semiconductor layer, and

the first conductive semiconductor layer has a composition formula of Al_sGa_1-sN (0.20≤

s≤

0.45).