Piezoelectric drive apparatus for motor and method for manufacturing the same, motor, robot, and pump
First Claim
1. A piezoelectric drive apparatus for a motor, the apparatus comprising:
- a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction;
a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode; and
a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body,wherein the longitudinal direction of the substrate coincides with a direction in which Young'"'"'s modulus is minimized in a plane of the substrate,the substrate is a silicon single crystal substrate,the substrate is a {110} substrate, andthe longitudinal direction of the substrate coincides with a <
100>
direction.
1 Assignment
0 Petitions
Accused Products
Abstract
A piezoelectric drive apparatus for a motor, the apparatus including a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction, a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode, and a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body, wherein the longitudinal direction of the substrate roughly coincides with a direction in which Young'"'"'s modulus is minimized in a plane of the substrate.
6 Citations
9 Claims
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1. A piezoelectric drive apparatus for a motor, the apparatus comprising:
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a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction; a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode; and a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body, wherein the longitudinal direction of the substrate coincides with a direction in which Young'"'"'s modulus is minimized in a plane of the substrate, the substrate is a silicon single crystal substrate, the substrate is a {110} substrate, and the longitudinal direction of the substrate coincides with a <
100>
direction. - View Dependent Claims (2, 3, 4, 5)
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6. A piezoelectric drive apparatus for a motor, the apparatus comprising:
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a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction; a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode; and a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body, wherein the longitudinal direction of the substrate coincides with a direction in which a value of Ey/Ex/Gxy is maximized in a plane of the substrate, where Gxy represents a shear elastic coefficient of the substrate in the widthwise direction thereof, Ex represents Young'"'"'s modulus of the substrate in the longitudinal direction thereof, and Ey represents Young'"'"'s modulus of the substrate in the widthwise direction thereof. - View Dependent Claims (7, 8, 9)
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Specification