Phase-change material (PCM) radio frequency (RF) switch with reduced parasitic capacitance

• US 10,644,235 B2
• Filed: 10/16/2018
• Issued: 05/05/2020
• Est. Priority Date: 08/14/2018
• Status: Active Grant

• Current Assignee: Newport Fab, LLC (Tower Semiconductor Limited)
• Original Assignee: Newport Fab, LLC (Tower Semiconductor Limited)
• Inventors: El-Hinnawy, Nabil, Slovin, Gregory P., Rose, Jefferson E., Howard, David J.
• Primary Examiner(s): Oh, Jaehwan
• Application Number:
  US16/161,960
• Publication Number:
  US 20200058848A1
• Time in Patent Office: 567 Days
• CPC Class Codes: H10B 63/80 Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/823 adapted for essentially horizontal current flow, e.g. bridge type devices
• CPC Class Codes: H10N 70/841 Electrodes
• CPC Class Codes: H10N 70/8613 Heating or cooling means other than resistive heating electrodes, e.g. heater in parallel
• CPC Class Codes: H10N 70/8828 Tellurides, e.g. GeSbTe

Abstract

A reduced parasitic capacitance radio frequency (RF) switch includes a phase-change material (PCM) and a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM. A PCM contact connects a PCM routing interconnect with a passive segment of the PCM, wherein the passive segment extends outward and is transverse to the heating element. A heating element contact connects a heating element routing interconnect with a terminal segment of the heating element. The heating element contact is situated cross-wise to the PCM contact. The heating element routing interconnect is situated at a different interlayer metal level relative to the PCM routing interconnect so as to achieve the reduced parasitic capacitance. The heating element routing interconnect can be situated above the heating element. Alternatively, the heating element routing interconnect can be situated below the heating element.

Claims

1. A reduced parasitic capacitance radio frequency (RF) switch comprising:

a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;

a PCM contact connecting a PCM routing interconnect with a passive segment of said PCM, said passive segment extending outward and transverse to said heating element;

a heating element contact connecting a heating element routing interconnect with a terminal segment of said heating element;

said heating element contact being situated cross-wise to said PCM contact, and wherein said heating element routing interconnect is situated at a different interlayer metal level relative to said PCM routing interconnect so as to achieve said reduced parasitic capacitance for said RF switch.

2. The reduced parasitic capacitance RF switch of claim 1, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM contact and said heating element contact.

3. The reduced parasitic capacitance RF switch of claim 1, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM routing interconnect and said heating element routing interconnect.

4. The reduced parasitic capacitance RF switch of claim 1, wherein said heating element routing interconnect is situated at a lowest interlayer metal level.

5. The reduced parasitic capacitance RF switch of claim 1, wherein said PCM routing interconnect is situated at a top interlayer metal level.

6. The reduced parasitic capacitance RF switch of claim 1, wherein said PCM is selected from the group consisting of germanium telluride (Ge_XTe_Y), germanium antimony telluride (Ge_XSb_YTe_Z), and any other chalcogenide.

7. The reduced parasitic capacitance RF switch of claim 1, wherein said heating element comprises a material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

8. The reduced parasitic capacitance RF switch of claim 1, wherein a plurality of said RF switches are arranged in an array of RF switches, and wherein a corresponding plurality of said heating element routing interconnects are situated at said different interlayer metal level relative to a corresponding plurality of said PCM routing interconnects so as to achieve a further reduced parasitic capacitance for said array of RF switches.

9. A reduced parasitic capacitance radio frequency (RF) switch comprising:

a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;

a PCM contact connecting a PCM routing interconnect with a passive segment of said PCM, said passive segment extending outward and transverse to said heating element;

a heating element contact connecting a heating element routing interconnect with a terminal segment of said heating element;

said heating element contact being situated cross-wise to said PCM contact;

said heating element routing interconnect is situated above said heating element;

said PCM routing interconnect is situated above said heating element routing interconnect so as to achieve said reduced parasitic capacitance for said RF switch.

10. The reduced parasitic capacitance RF switch of claim 9, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM contact and said heating element contact.

11. The reduced parasitic capacitance RF switch of claim 9, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM routing interconnect and said heating element routing interconnect.

12. The reduced parasitic capacitance RF switch of claim 9, wherein said PCM is selected from the group consisting of germanium telluride (Ge_XTe_Y), germanium antimony telluride (Ge_XSb_YTe_Z), and any other chalcogenide.

13. The reduced parasitic capacitance RF switch of claim 9, wherein said heating element comprises a material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

14. The reduced parasitic capacitance RF switch of claim 9, wherein a plurality of said RF switches are arranged in an array of RF switches, and wherein a corresponding plurality of said heating element routing interconnects are situated above said heating element, and a corresponding plurality of said PCM routing interconnects are situated above said corresponding plurality of said heating element routing interconnects so as to achieve a further reduced parasitic capacitance for said array of RF switches.

15. A reduced parasitic capacitance radio frequency (RF) switch comprising:

a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;

a PCM contact connecting a PCM routing interconnect with a passive segment of said PCM, said passive segment extending outward and transverse to said heating element;

a heating element contact connecting a heating element routing interconnect with a terminal segment of said heating element;

said heating element contact being situated cross-wise to said PCM contact;

said heating element routing interconnect is situated below said heating element;

said PCM routing interconnect is situated above said heating element so as to achieve said reduced parasitic capacitance for said RF switch.

16. The reduced parasitic capacitance RF switch of claim 15, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM contact and said heating element contact.

17. The reduced parasitic capacitance RF switch of claim 15, wherein said reduced parasitic capacitance is achieved by reducing a capacitance value of a parasitic capacitor formed between said PCM routing interconnect and said heating element routing interconnect.

18. The reduced parasitic capacitance RF switch of claim 15, wherein said PCM is selected from the group consisting of germanium telluride (Ge_XTe_Y), germanium antimony telluride (Ge_XSb_YTe_Z), and any other chalcogenide.

19. The reduced parasitic capacitance RF switch of claim 15, wherein said heating element comprises a material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

20. The reduced parasitic capacitance RF switch of claim 15, wherein a plurality of said C_OFF RF switches are arranged in an array of RF switches, and wherein a corresponding plurality of said heating element routing interconnects are situated below said heating element, and a corresponding plurality of said PCM routing interconnects are situated above said heating element so as to achieve a further reduced C_OFF for said array of RF switches.