Deposition mask, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus

• US 10,644,240 B2
• Filed: 11/26/2018
• Issued: 05/05/2020
• Est. Priority Date: 03/09/2016
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Kim, Sanghoon
• Primary Examiner(s): Ahmadi, Mohsen
• Application Number:
  US16/199,782
• Publication Number:
  US 20190097134A1
• Time in Patent Office: 526 Days
• CPC Class Codes: C23C 14/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/044 using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• CPC Class Codes: C30B 25/04 Pattern deposit, e.g. by using masks
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/20 Changing the shape of the active layer in the devices, e.g. patterning

Abstract

A deposition mask extending in a first direction may include: a pattern portion including a plurality of pattern holes; and a clamping portion including a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion may include a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

Claims

1. A method of manufacturing a display apparatus, the method comprising:

inserting a substrate and a mask frame assembly into an inside of a chamber;

aligning the substrate and the mask frame assembly; and

depositing, on the substrate, a depositing material ejected from a deposition source and passed through the mask frame assembly,

wherein the mask frame assembly comprises;

a frame comprising an opening at a center portion thereof;

a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask; and

a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask, and supporting the deposition mask, wherein the deposition mask comprises;

a pattern portion comprising a plurality of pattern holes; and

a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion,

wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion towards the indentation portion, the second direction crossing the first direction.

2. The method of claim 1, wherein the plurality of pattern holes are disposed corresponding to target deposition areas.

3. The method of claim 1, wherein a number of the plurality of pattern holes that overlap the protrusion portion in the first direction is less than a number of the plurality of pattern holes that overlap the indentation portion in the first direction.

4. The method of claim 1, wherein a number of the plurality of pattern holes arranged in the first direction is gradually reduced in a direction from the indentation portion toward the protrusion portion in the second direction.

5. The method of claim 1, wherein the blocking portion has an area gradually decreasing in a direction from the clamping portion toward the pattern portion in the first direction.

6. The method of claim 1, wherein the blocking portion has a multistep shape in the first direction and the second direction.