Semiconductor optical device and method of manufacturing the same
First Claim
1. A semiconductor optical device comprising a semiconductor layer and a wiring electrode portion on a surface of the semiconductor layer that serves as one of a light emitting surface and a light receiving surface,wherein a line width of the wiring electrode portion is 2 μ
- m or more and 5 μ
m or less,the wiring electrode portion has a metal layer on the semiconductor layer and a conductive hard film on the metal layer,the conductive hard film is harder than the metal layer, anda thickness of the conductive hard film is 0.7 μ
m or more and 1.5 μ
m or less.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a semiconductor optical device with light extraction efficiency or light collecting efficiency higher than that of conventional devices and with a reduced peeling ratio of a wiring electrode portion, and a method of manufacturing the same. In the semiconductor optical, a wiring electrode portion 120 is provided on a surface of a semiconductor layer 110 that serves as a light emitting surface or a light receiving surface, the line width W1 of the wiring electrode portion 120 is 2 μm or more and 5 μm or less, the wiring electrode portion 120 has a metal layer 121 on the semiconductor layer 110 and a conductive hard film 122 on the metal layer 121, and the conductive hard film 122 is harder than the metal layer 121.
7 Citations
10 Claims
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1. A semiconductor optical device comprising a semiconductor layer and a wiring electrode portion on a surface of the semiconductor layer that serves as one of a light emitting surface and a light receiving surface,
wherein a line width of the wiring electrode portion is 2 μ - m or more and 5 μ
m or less,the wiring electrode portion has a metal layer on the semiconductor layer and a conductive hard film on the metal layer, the conductive hard film is harder than the metal layer, and a thickness of the conductive hard film is 0.7 μ
m or more and 1.5 μ
m or less. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- m or more and 5 μ
-
8. A method of manufacturing a semiconductor optical device, comprising a wiring electrode portion formation step of forming a wiring electrode portion on a surface of a semiconductor layer that serves as one of a light emitting surface and a light receiving surface,
wherein a line width of the wiring electrode portion is 2 μ - m or more and 5 μ
m or less, andthe wiring electrode portion formation step includes a first step of forming a metal layer on the surface of the semiconductor layer and a second step of forming a conductive hard film having a thickness of 0.7 μ
m or more and 1.5 μ
m or less on the metal layer. - View Dependent Claims (9, 10)
- m or more and 5 μ
Specification