Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
First Claim
1. A micro-electro-mechanical-systems processing method, comprising:
- in a first step,irradiating a plurality of single field-of-view points with a charged particle beam in a first region of a sample;
measuring a shape of a spot hole formed in the first region of the sample; and
setting, based on measurement results of the shape of the spot hole, a scan condition of the charged particle beam or a forming mask of the charged particle beam at each of the single field-of-view points; and
in a second step,irradiating, based on the scan condition or the forming mask set in the first step, a second region of the sample with the charged particle beam.
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Abstract
The invention is to reduce non-uniformity of a processing shape over a wide range of a single field-of-view.
The invention is directed to a method of processing micro electro mechanical systems with a first step and a second step in a processing apparatus including an irradiation unit that irradiates a sample with a charged particle beam, a shape measuring unit that measures a shape of the sample, and a control unit. In the first step, the irradiation unit irradiates a plurality of single field-of-view points with the charged particle beam in a first region of the sample, the shape measuring unit measures the shape of a spot hole formed in the first region of the sample, and the control unit sets, based on measurement results of the shape of the spot hole, a scan condition of the charged particle beam or a forming mask of the charged particle beam at each of the single field-of-view points. In the second step, the irradiation unit irradiates, based on the scan condition or the forming mask set in the first step, a second region of the sample with the charged particle beam.
11 Citations
8 Claims
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1. A micro-electro-mechanical-systems processing method, comprising:
in a first step, irradiating a plurality of single field-of-view points with a charged particle beam in a first region of a sample; measuring a shape of a spot hole formed in the first region of the sample; and setting, based on measurement results of the shape of the spot hole, a scan condition of the charged particle beam or a forming mask of the charged particle beam at each of the single field-of-view points; and in a second step, irradiating, based on the scan condition or the forming mask set in the first step, a second region of the sample with the charged particle beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
Specification