Transition radiation light sources
First Claim
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1. A transition radiation light source comprising:
- a charged particle beam configured to pass a charged particle beam through a transition radiation production target and produce transition radiation light having a wavelength in the range of at least 13.5 nm to in the optical wavelength region;
the transition radiation production target having at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets.
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Abstract
Transition radiation from nanotubes, nanosheets, and nanoparticles and in particular, boron nitride nanomaterials, can be utilized for the generation of light. Wavelengths of light of interest for microchip lithography, including 13.5 nm (91.8 eV) and 6.7 nm (185 eV), can be generated at useful intensities, by transition radiation light sources. Light useful for monitoring relativistic charged particle beam characteristics such as spatial distribution and intensity can be generated.
4 Citations
20 Claims
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1. A transition radiation light source comprising:
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a charged particle beam configured to pass a charged particle beam through a transition radiation production target and produce transition radiation light having a wavelength in the range of at least 13.5 nm to in the optical wavelength region; the transition radiation production target having at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 19, 20)
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11. A method for generating transition radiation light comprising:
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passing a charged particle beam through a transition radiation target having at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets; and emitting a transition radiation light from the transition radiation target, the emitted light having a wavelength in the range of at least 13.5 nm to in the optical wavelength region. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification