Supervisory control of radio frequency (RF) impedance tuning operation
First Claim
1. A method for controlling a radio frequency (RF) system having a RF generator comprising:
- generating a RF signal and varying a frequency of the RF signal; and
in a first mode of operation, when the RF signal is at a first target frequency, adjusting the frequency of the RF signal to adjust an impedance match between the RF generator and a load and adjusting an impedance tuning element of a matching network to provide an impedance match between the RF generator and the load, andin a second mode of operation, adjusting the impedance tuning element to provide an impedance match between the RF generator and the load and also inhibiting adjusting the frequency of the RF signal to adjust the impedance match, while adjusting the frequency of the RF signal from the first target frequency to a second target frequency.
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Accused Products
Abstract
A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.
25 Citations
35 Claims
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1. A method for controlling a radio frequency (RF) system having a RF generator comprising:
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generating a RF signal and varying a frequency of the RF signal; and in a first mode of operation, when the RF signal is at a first target frequency, adjusting the frequency of the RF signal to adjust an impedance match between the RF generator and a load and adjusting an impedance tuning element of a matching network to provide an impedance match between the RF generator and the load, and in a second mode of operation, adjusting the impedance tuning element to provide an impedance match between the RF generator and the load and also inhibiting adjusting the frequency of the RF signal to adjust the impedance match, while adjusting the frequency of the RF signal from the first target frequency to a second target frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A radio frequency (RF) control system comprising:
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a RF generator including a power amplifier that outputs a RF signal, the RF generator generating a RF output signal to a matching network, the matching network receiving the RF signal, the matching network including an impedance tuning element; and a controller varying a frequency of the RF signal and communicating commands to the matching network to adjust a tuning element that varies an impedance between a RF generator and a load, the controller operating the RF generator in one of two modes of operation, wherein in a first mode of operation, when the RF signal is at a first target frequency, the controller both applies automatic frequency tuning (AFT) and adjusts the tuning element to vary an impedance match between the RF generator and a load, and in a second mode of operation, as the frequency of the RF signal is adjusted from the first target frequency to a second target frequency, the controller controls the impedance tuning element to vary the impedance match and inhibits AFT or the controller controls the impedance tuning element to vary the impedance match. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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- 21. A controller for a radio frequency (RF) control system operable in one of two modes wherein a first mode of operation, when the RF signal is at a first target frequency, the controller adjusts a frequency of a RF signal to provide an impedance match between an RF generator and a load and adjusts a tuning element to vary the impedance match between the RF generator and the load and a second mode of operation in which the controller adjusts the tuning element to vary an impedance match between the RF generator and the load, while adjusting the frequency of the RF signal from the first target frequency to a second target frequency.
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27. A controller for a radio frequency (RF) control system, the RF control system including a RF generator having a power amplifier that outputs a RF signal to a matching network, the matching network receiving the RF signal, the matching network including at least one tuning element that varies an impedance between the RF generator and a load, the controller varying a frequency of the RF signal and communicating commands to the matching network to adjust the tuning element, wherein:
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in a first mode of operation, when the RF signal is at a first target frequency, the controller adjusts the frequency of the RF signal and adjusts the tuning element to provide an impedance match between the RF generator and a load, and in a second mode of operation, the controller adjusts the tuning element to provide an impedance match between the RF generator and the load and also inhibits adjusting the frequency of the RF signal to adjust the impedance match, while adjusting the frequency of the RF signal from the first target frequency to a second target frequency. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35)
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Specification