Showerhead assembly with multiple fluid delivery zones

• US 10,669,629 B2
• Filed: 11/15/2018
• Issued: 06/02/2020
• Est. Priority Date: 10/09/2015
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bansal, Amit Kumar, Rocha-Alvarez, Juan Carlos, Baluja, Sanjeev, Kim, Sam H., Nguyen, Tuan Anh
• Primary Examiner(s): Tadesse, Yewebdar T
• Application Number:
  US16/192,228
• Publication Number:
  US 20190100839A1
• Time in Patent Office: 565 Days
• Field of Search: 118723 R, 118723 E, 118715, 239548, 15634534, 15634546, 216 67
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas

Abstract

The present disclosure relates to a semiconductor processing apparatus. The processing chamber includes a chamber body and lid defining an interior volume, a substrate support disposed in the interior volume and a showerhead assembly disposed between the lid and the substrate support. The showerhead assembly includes a faceplate configured to deliver a process gas to a processing region defined between the showerhead assembly and the substrate support and an underplate positioned above the faceplate, defining a first plenum between the lid and the underplate, the having multiple zones, wherein each zone has a plurality of openings that are configured to pass an amount of inert gas from the first plenum into a second plenum defined between the faceplate and the underplate, in fluid communication with the plurality of openings of each zone such that the inert gas mixes with the process gas before exiting the showerhead assembly.

Claims

1. A showerhead assembly, comprising:

an underplate;

a diffuser plate disposed adjacent the underplate, wherein a first plenum is defined between the underplate and the diffuser plate;

a movable conductance controller assembly extending through the underplate into the first plenum, the movable conductance controller assembly configured to control the conductance of a first gas within the first plenum, wherein the movable conductance controller assembly comprises a conductance controller and an actuator; and

a faceplate having a first side and a second side, the first side of the faceplate being disposed adjacent to the diffuser plate, wherein a second plenum is defined between the diffuser plate and the first side of the faceplate.

2. The showerhead assembly of claim 1, wherein the actuator is configured to move the conductance controller.

3. The showerhead assembly of claim 2, wherein moving the conductance controller controls an amount of flow of a process gas mixture to be distributed in the first plenum.

4. The showerhead assembly of claim 1, further comprising:

a central conduit extending through the underplate to the first plenum, wherein the central conduit is configured to provide the first gas to the first plenum; and

an inert gas line extending through the underplate to the first plenum, wherein the inert gas line is configured to provide a second gas different than the first gas to the first plenum.

5. The showerhead assembly of claim 4, wherein the first gas mixes with the second gas in the first plenum.

6. The showerhead assembly of claim 5, wherein the diffuser plate comprises a plurality of apertures configured to pass the second gas mixed with the first gas from the first plenum to the second plenum.

7. The showerhead assembly of claim 6, wherein the faceplate has a plurality of apertures configured to deliver the second gas mixed with the first gas from the second plenum to the second side of the faceplate.

8. The showerhead assembly of claim 7, wherein the conductance controller comprises a shaft and a plate coupled to an end of the shaft.

9. The showerhead assembly of claim 8, wherein the movable conductance controller assembly further comprises:

a z-stage configured to support the actuator.

10. The showerhead assembly of claim 1, wherein the conductance controller controls an amount of the first gas exiting the faceplate.

11. A processing chamber, comprising:

a chamber body;

a substrate support assembly disposed within the chamber body; and

a shower head assembly disposed above the substrate support assembly within the chamber body, wherein the showerhead assembly comprises;

an underplate;

a diffuser plate disposed adjacent the underplate, wherein a first plenum is defined between the underplate and the diffuser plate;

a movable conductance controller assembly extending through the underplate into the first plenum, the movable conductance controller assembly configured to control the conductance of a first gas within the first plenum, wherein the movable conductance controller assembly comprises a conductance controller and an actuator; and

a faceplate having a first side and a second side, the first side of the faceplate being disposed adjacent to the diffuser plate, wherein a second plenum is defined between the diffuser plate and the first side of the faceplate.

12. The processing chamber of claim 11, wherein the actuator is configured to move the conductance controller.

13. The processing chamber of claim 12, wherein moving the conductance controller controls an amount of flow of a process gas mixture to be distributed in the first plenum.

14. The processing chamber of claim 11, further comprising:

a central conduit extending through the underplate to the first plenum, wherein the central conduit is configured to provide the first gas to the first plenum; and

an inert gas line extending through the underplate to the first plenum, wherein the inert gas line is configured to provide a second gas different than the first gas to the first plenum.

15. The processing chamber of claim 14, wherein the first gas mixes with the second gas in the first plenum.

16. The processing chamber of claim 15, wherein the diffuser plate comprises a plurality of apertures configured to pass the second gas mixed with the first gas from the first plenum to the second plenum.

17. The processing chamber of claim 16, wherein the faceplate has a plurality of apertures configured to deliver the second gas mixed with the first gas from the second plenum to the second side of the faceplate.

18. The processing chamber of claim 17, wherein the conductance controller comprises a shaft and a plate coupled to an end of the shaft.

19. The processing chamber of claim 18, wherein the movable conductance controller assembly further comprises:

a z-stage configured to support the actuator.

20. The processing chamber of claim 11, wherein the conductance controller controls an amount of the first gas exiting the faceplate.