Method and apparatus for magnetic sensor producing a changing magnetic field

• US 10,670,672 B2
• Filed: 07/09/2018
• Issued: 06/02/2020
• Est. Priority Date: 07/19/2013
• Status: Active Grant

• Current Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Original Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Inventors: David, Paul A., Taylor, William P.
• Primary Examiner(s): Rodak, Lee E
• Application Number:
  US16/029,826
• Publication Number:
  US 20180313912A1
• Time in Patent Office: 694 Days
• CPC Class Codes: G01D 5/147 influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
• CPC Class Codes: G01D 5/2013 by a movable ferromagnetic element, e.g. a core G01D5/2033 takes precedence
• CPC Class Codes: G01D 5/202 by movable a non-ferromagnetic conductive element G01D5/2033 takes precedence
• CPC Class Codes: G01R 33/00 Arrangements or instruments for measuring magnetic variables
• CPC Class Codes: G01R 33/07 Hall effect devices
• CPC Class Codes: G01R 33/09 Magnetoresistive devices
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00

Abstract

Methods and apparatus for detecting a magnetic field include a semiconductor substrate, a coil configured to provide a changing magnetic field in response to a changing current in the coil; and a magnetic field sensing element supported by the substrate. The coil receives the changing current and, in response, generates a changing magnetic field. The magnetic field sensing element detects the presence of a magnetic target by detecting changes to the magnetic field caused by the target and comparing them to an expected value.

Claims

1. A magnetic field sensor comprising:

a semiconductor substrate having a surface in a plane;

a coil configured to provide an alternating magnetic field in response to an alternating current in the coil, wherein the coil is placed in proximity to a target that moves toward and/or away from the semiconductor substrate, the coil configured to produce eddy currents within the target; and

a magnetic field sensing element supported on the surface of the substrate to sense a magnetic field produced by the eddy currents and produce an output signal representing the magnetic field produced by the eddy currents as sensed by the magnetic field sensing element, wherein the output signal changes in response to a changing distance between the target and the semiconductor substrate, wherein the magnetic field sensing element is sensitive in the plane of the substrate; and

a processing circuit coupled to receive the output signal and calculate the distance between the target and the semiconductor substrate,

wherein the coil overlaps at least a portion of the magnetic field sensing element.

2. The magnetic field sensor of claim 1 wherein the coil is formed from at least one metal layer disposed on a surface of the substrate.

3. The magnetic field sensor of claim 1 wherein the magnetic field sensing element is a giant magnetoresistive (GMR) transducer.

4. The magnetic field sensor of claim 1 wherein the magnetic field sensing element comprises a plurality of magnetoresistance elements in a bridge configuration.

5. The magnetic field sensor of claim 1 wherein the magnetic field sensing element is a vertical Hall element.

6. The magnetic field sensor of claim 1 wherein the alternating magnetic field has a direction perpendicular to the surface of the substrate.

7. The magnetic field sensor of claim 1 further including a pulsed current source coupled to the coil to produce a pulsed, alternating magnetic field.

8. The magnetic field sensor of claim 1 wherein the coil is positioned above or below the substrate.

9. The magnetic field sensor of claim 1 wherein the coil is a separately formed element included in a same package with the substrate.

10. The magnetic field sensor of claim 1 wherein the magnetic field sensing comprises a tunneling magnetoresistance (TMR) element and/or a magnetic tunnel junction (MJT) element.

11. A magnetic field sensor comprising:

a semiconductor substrate;

a coil configured to provide an alternating magnetic field in response to an alternating current in the coil, wherein the coil is placed in proximity to a target that moves toward and/or away from the semiconductor substrate, the coil configured to produce eddy currents within the target;

a magnetic field sensing element supported on a surface of the substrate to sense a magnetic field produced by the eddy currents and produce an output signal representing the magnetic field produced by the eddy currents as sensed by the magnetic field sensing element, wherein the output signal changes in response to a changing distance between the target and the semiconductor substrate; and

a processing circuit coupled to receive the output signal and calculate the distance between the target and the semiconductor substrate,

wherein the magnetic field sensing element comprises a first, a second, a third and a fourth magnetoresistance elements,

wherein the first and second magnetoresistance elements are positioned at an end of the coil and the third and fourth magnetoresistance elements are positioned at an opposing end of the coil

wherein the whole of the coil is between the first and third magnetoresistance elements and the whole of the coil is between the second and fourth magnetoresistance elements.

12. The magnetic field sensor of claim 11 further including a pulsed current source coupled to the coil to produce a pulsed, alternating magnetic field.

13. The magnetic field sensor of claim 11 wherein the coil is a separately formed element included in a same package with the substrate.

14. A method of detecting a magnetic field comprising:

providing a semiconductor substrate;

driving a changing current through a coil so that the coil generates an alternating magnetic field in the coil, wherein the coil is placed in proximity to a target that moves toward and/or away from the semiconductor substrate, the coil configured to produce eddy currents within the target; and

sensing, with a magnetic field sensing element supported on a surface of the substrate, magnetic fields produced by the eddy currents, wherein the magnetic field sensing element is sensitive in the plane of the substrate;

positioning the coil to overlap at least a portion of the magnetic field sensing element;

producing, by the magnetic field sensing element, an output signal representing the magnetic fields produced by the eddy currents, wherein the output signal changes in response to a changing distance between the target and the semiconductor substrate; and

calculating the distance between the target and the semiconductor substrate.

15. The method of claim 14 further comprising forming the coil from one or more metal layers disposed on a surface of the substrate.

16. The method of claim 14 further comprising providing the magnetic field sensing element in the form of a plurality of magnetoresistance elements in a bridge configuration.

17. The method of claim 14 further comprising supplying a pulsed or transient current to the coil.

18. The method of claim 14 further comprising attaching the coil to a top or bottom surface of the substrate.

19. The method of claim 14 further comprising providing the coil as a separately formed element within a same package as the substrate.

21. The method of claim 14 further comprising providing the magnetic field sensing element in the form of a Hall element.

20. A method of detecting a magnetic field comprising:

providing a semiconductor substrate;

driving a changing current through a coil so that the coil generates an alternating magnetic field in the coil, wherein the coil is placed in proximity to a target that moves toward and/or away from the semiconductor substrate, the coil configured to produce eddy currents within the target; and

sensing, with a magnetic field sensing element supported on a surface of the substrate, magnetic fields produced by the eddy currents, wherein the output signal changes in response to a changing distance between the target and the semiconductor substrate, the magnetic field sensing element comprises a first, a second, a third and a fourth magnetoresistance elements,

positioning the first magnetoresistance element and a second magnetoresistance element at an end of the coil and positioning a third magnetoresistance element and a fourth magnetoresistance element at an opposing end of the coil, wherein the positioning comprises placing the whole of the coil between the first and third magnetoresistance elements and between the second and fourth magnetoresistance elements;

producing, by the magnetic field sensing element, an output signal representing the magnetic fields produced by the eddy currents; and

calculating the distance between the target and the semiconductor substrate.

22. The method of claim 20 further comprising supplying a pulsed or transient current to the coil.

23. The method of claim 20 further comprising attaching the coil to a top or bottom surface of the substrate.

24. The method of claim 20 further comprising providing the coil as a separately formed element within a same package as the substrate.