Integrated circuit device
First Claim
1. An integrated circuit device comprising:
- a substrate comprising a first device region and a second device region spaced from the first device region;
a device isolation region between the first device region and the second device region;
a first fin separation insulating portion arranged on the first device region and having a first width in a first horizontal direction;
a pair of first fin-type active regions in the first device region, the pair of first fin-type active regions including a first element and a second element spaced from each other, with the first fin separation insulating portion between the first element and the second element, the first element and the second element collinearly extending in the first horizontal direction;
a second fin separation insulating portion extending in a second horizontal direction over the first device region, the device isolation region, and the second device region, and having a second width in the first horizontal direction that is less than the first width, the second horizontal direction crossing the first horizontal direction; and
a pair of second fin-type active regions spaced from each other with the second fin separation insulating portion therebetween in the second device region and collinearly extending in the first horizontal direction,wherein the first fin separation insulating portion and the second fin separation insulating portion vertically overlap each other.
1 Assignment
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Accused Products
Abstract
An integrated circuit device includes a substrate including a first device region and a second device region; a first fin separation insulating portion on the first device region; a pair of first fin-type active regions spaced from each other with the first fin separation insulating portion therebetween in the first device region and collinearly extending in a first horizontal direction; a second fin separation insulating portion extending in a second horizontal direction over the first device region and the second device region; and a pair of second fin-type active regions spaced from each other with the second fin separation insulating portion therebetween and collinearly extending in the first horizontal direction, wherein the first fin separation insulating portion and the second fin separation insulating portion vertically overlap each other.
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Citations
20 Claims
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1. An integrated circuit device comprising:
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a substrate comprising a first device region and a second device region spaced from the first device region; a device isolation region between the first device region and the second device region; a first fin separation insulating portion arranged on the first device region and having a first width in a first horizontal direction; a pair of first fin-type active regions in the first device region, the pair of first fin-type active regions including a first element and a second element spaced from each other, with the first fin separation insulating portion between the first element and the second element, the first element and the second element collinearly extending in the first horizontal direction; a second fin separation insulating portion extending in a second horizontal direction over the first device region, the device isolation region, and the second device region, and having a second width in the first horizontal direction that is less than the first width, the second horizontal direction crossing the first horizontal direction; and a pair of second fin-type active regions spaced from each other with the second fin separation insulating portion therebetween in the second device region and collinearly extending in the first horizontal direction, wherein the first fin separation insulating portion and the second fin separation insulating portion vertically overlap each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An integrated circuit device comprising:
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a substrate comprising a first device region and a second device region spaced from the first region; a device isolation region between the first device region and the second device region; a first fin separation insulating portion on the first device region; a plurality of pairs of first fin-type active regions in the first device region, each of the plurality of pairs including a first element and a second element spaced from the first element with the first fin separation insulating portion therebetween, the first element collinearly extending with the second element in a first horizontal direction; a plurality of second fin separation insulating portions extending in a second horizontal direction over the first device region, the device isolation region, and the second device region, and spaced apart from each other, the second horizontal direction crossing the first horizontal direction; and a plurality of second fin-type active regions in the second device region, the plurality of second fin-type active regions arranged in a straight line extending in a direction across the plurality of second fin separation insulating portions, wherein the first fin separation insulating portion and the plurality of second fin separation insulating portions vertically overlap each other. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An integrated circuit device comprising:
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a substrate comprising a first device region and a second device region spaced apart from each other; a first fin separation insulating portion over the first device region; a pair of first fin-type active regions in the first device region, the pair of first fin-type active regions including a first element and a second element spaced from the first element with the first fin separation insulating portion therebetween, the first element collinearly extending with the second element in a first horizontal direction; a device isolation region; a plurality of second fin separation insulating portions covering an upper surface of the first fin separation insulating portion and vertically overlapping the first fin separation insulating portion, the plurality of second fin separation insulating portions extending in a second horizontal direction from an upper portion of the first device region to an upper portion of the second device region through the device isolation region, the second horizontal direction crossing the first horizontal direction; and a plurality of second fin-type active regions in the second device region, the plurality of second fin-type active regions spaced from each other with the plurality of second fin separation insulating portions therebetween, the plurality of second fin-type active regions collinearly extending in the first horizontal direction. - View Dependent Claims (17, 18, 19, 20)
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Specification