Non-line of sight deposition of erbium based plasma resistant ceramic coating
First Claim
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1. An article comprising:
- a surface; and
a plasma resistant ceramic coating on the surface of the article, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−
5%, and wherein the plasma resistant ceramic coating is selected from a group consisting of;
an erbium containing fluoride of YxEryFz, where x, y and z are selected such that the erbium containing fluoride of YxEryFz contains over 0 mol % to under 100 mol % YF3 and over 0 mol % to under 100 mol % ErF3, andan erbium containing oxy-fluoride of YmErxOyFz, where w, x, y and z are selected such that the erbium containing oxy-fluoride of YmErxOyFz contains over 0 mol % to under 100 mol % of two or more of Y2O3,YF3, Er2O3 and ErF3,wherein the article comprises a portion having an aspect ratio between 10;
1 and 200;
1, and wherein the surface of the article that is coated with the plasma resistant ceramic coating comprises the portion of the article.
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Abstract
Described herein is a method of depositing a plasma resistant ceramic coating onto a surface of a chamber component using a non-line-of-sight (NLOS) deposition process, such as atomic layer deposition (ALD) and chemical vapor deposition (CVD). The plasma resistant ceramic coating consists of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride. Also described are chamber components having a plasma resistant ceramic coating of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride.
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Citations
18 Claims
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1. An article comprising:
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a surface; and a plasma resistant ceramic coating on the surface of the article, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−
5%, and wherein the plasma resistant ceramic coating is selected from a group consisting of;an erbium containing fluoride of YxEryFz, where x, y and z are selected such that the erbium containing fluoride of YxEryFz contains over 0 mol % to under 100 mol % YF3 and over 0 mol % to under 100 mol % ErF3, and an erbium containing oxy-fluoride of YmErxOyFz, where w, x, y and z are selected such that the erbium containing oxy-fluoride of YmErxOyFz contains over 0 mol % to under 100 mol % of two or more of Y2O3,YF3, Er2O3 and ErF3, wherein the article comprises a portion having an aspect ratio between 10;
1 and 200;
1, and wherein the surface of the article that is coated with the plasma resistant ceramic coating comprises the portion of the article. - View Dependent Claims (2, 3, 4)
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5. A chamber component, comprising:
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a portion having an aspect ratio between 10;
1 and 200;
1; anda plasma resistant ceramic coating on a surface of the portion the chamber component, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−
5%, and wherein the plasma resistant ceramic coating comprises a multi-layer stack comprising;a first layer consisting essentially of Er2O3 or ErF3; and a second layer consisting of a different material than the first layer, wherein the second layer consists essentially of Er2O3, Al2O3, ErF3, Y2O3, YF3, or ZrO2. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An article comprising:
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a surface; and a plasma resistant ceramic coating on the surface of the article, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−
5%, and wherein the plasma resistant ceramic coating is an interdiffused mixture of a plurality of alternating layers, the plurality of alternating layers comprising;a first plurality of layers consisting essentially of Er2O3 or ErF3; and a second plurality of layers consisting of a different material than the first layer, wherein the second layer consists essentially of Er2O3, Al2O3, ErF3, Y2O3, YF3, or ZrO2, wherein the article comprises a portion having an aspect ratio between 10;
1 and 200;
1, and wherein the surface of the article that is coated with the plasma resistant ceramic coating comprises the portion of the article.
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Specification