Non-line of sight deposition of erbium based plasma resistant ceramic coating

• US 10,676,819 B2
• Filed: 11/22/2017
• Issued: 06/09/2020
• Est. Priority Date: 06/23/2016
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Sun, Jennifer Y
• Primary Examiner(s): Lund, Jeffrie R
• Application Number:
  US15/820,871
• Publication Number:
  US 20180094348A1
• Time in Patent Office: 930 Days
• CPC Class Codes: C23C 16/0227 by cleaning or etching
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/40 Oxides
• CPC Class Codes: C23C 16/403 of aluminium, magnesium or beryllium
• CPC Class Codes: C23C 16/405 of refractory metals or yttrium
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45553 characterized by the use of precursors specially adapted for ALD
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: H01J 37/32467 Material
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma

Abstract

Described herein is a method of depositing a plasma resistant ceramic coating onto a surface of a chamber component using a non-line-of-sight (NLOS) deposition process, such as atomic layer deposition (ALD) and chemical vapor deposition (CVD). The plasma resistant ceramic coating consists of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride. Also described are chamber components having a plasma resistant ceramic coating of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride.

Claims

1. An article comprising:

a surface; and

a plasma resistant ceramic coating on the surface of the article, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−

5%, and wherein the plasma resistant ceramic coating is selected from a group consisting of;

an erbium containing fluoride of Y_xEr_yF_z, where x, y and z are selected such that the erbium containing fluoride of Y_xEr_yF_z contains over 0 mol % to under 100 mol % YF₃ and over 0 mol % to under 100 mol % ErF₃, and

an erbium containing oxy-fluoride of Y_mEr_xO_yF_z, where w, x, y and z are selected such that the erbium containing oxy-fluoride of Y_mEr_xO_yF_z contains over 0 mol % to under 100 mol % of two or more of Y₂O₃,YF₃, Er₂O₃ and ErF₃,

wherein the article comprises a portion having an aspect ratio between 10;

1 and 200;

1, and wherein the surface of the article that is coated with the plasma resistant ceramic coating comprises the portion of the article.

2. The article of claim 1, wherein the article is a chamber component selected from a group consisting of a shower head, a diffuser, a nozzle, and a gas line.

3. The article of claim 1, wherein the article comprises a conduit, wherein the surface of the article onto which the plasma resistant ceramic coating is deposited comprises an internal surface of the conduit that has an aspect ratio between 50:

1 and 200;

1.

4. The article of claim 1, wherein the plasma resistant coating has a thickness of 2 nm to 1 micron.

5. A chamber component, comprising:

a portion having an aspect ratio between 10;

1 and 200;

1; and

a plasma resistant ceramic coating on a surface of the portion the chamber component, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−

5%, and wherein the plasma resistant ceramic coating comprises a multi-layer stack comprising;

a first layer consisting essentially of Er₂O₃ or ErF₃; and

a second layer consisting of a different material than the first layer, wherein the second layer consists essentially of Er₂O₃, Al₂O₃, ErF₃, Y₂O₃, YF₃, or ZrO₂.

6. The chamber component of claim 5, wherein the chamber component is selected from a group consisting of a shower head, a diffuser, a nozzle, and a gas line.

7. The chamber component of claim 5, wherein the aspect ratio is between 50:

1 and 200;

1.

8. The chamber component of claim 7, wherein the portion having the aspect ratio is a conduit.

9. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of YF₃.

10. The chamber component of claim 5, wherein the plasma resistant ceramic coating further comprises one or more additional layers each consisting essentially of one of Er₂O₃, Al₂O₃, ErF₃, Y₂O₃ or YF₃.

11. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of Al₂O₃.

12. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of Y₂O₃.

13. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of ErF₃.

14. The chamber component of claim 5, wherein the first layer consists essentially of ErF₃ and the second layer consists essentially of YF₃.

15. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of ZrO₂.

16. The chamber component of claim 5, wherein the first layer consists essentially of Er₂O₃ and the second layer consists essentially of Y₂O₃, the multi-layer stack further comprising:

a third layer consisting essentially of ZrO₂ or Al₂O₃.

17. The chamber component of claim 5, wherein the first layer and the second layer each has a thickness of 0.1-100 nm.

18. An article comprising:

a surface; and

a plasma resistant ceramic coating on the surface of the article, wherein the plasma resistant ceramic coating has an approximately zero porosity and has a uniform thickness with a thickness variation of less than +/−

5%, and wherein the plasma resistant ceramic coating is an interdiffused mixture of a plurality of alternating layers, the plurality of alternating layers comprising;

a first plurality of layers consisting essentially of Er₂O₃ or ErF₃; and

a second plurality of layers consisting of a different material than the first layer, wherein the second layer consists essentially of Er₂O₃, Al₂O₃, ErF₃, Y₂O₃, YF₃, or ZrO₂,

wherein the article comprises a portion having an aspect ratio between 10;

1 and 200;

1, and wherein the surface of the article that is coated with the plasma resistant ceramic coating comprises the portion of the article.