Lithographic apparatus and device manufacturing method

• US 10,678,139 B2
• Filed: 01/11/2019
• Issued: 06/09/2020
• Est. Priority Date: 06/09/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Lof, Joeri, Butler, Hans, Donders, Sjoerd Nicolaas Lambertus, Kolesnychenko, Aleksey Yurievich, Loopstra, Erik Roelof, Meijer, Hendricus Johannes Maria, Mulkens, Johannes Catherinus Hubertus, Ritsema, Roelof Aeilko Siebrand, Van Schaik, Frank, Sengers, Timotheus Franciscus, Simon, Klaus, De Smit, Joannes Theodoor, Straaijer, Alexander, Streefkerk, Bob, Bijlaart, Erik Theodorus Maria, Hoogendam, Christiaan Alexander, Van Santen, Helmar, Van De Kerkhof, Marcus Adrianus, Kroon, Mark, Den Boef, Arie Jeffrey, Ottens, Joost Jeroen, Mertens, Jeroen Johannes Sophia Maria
• Primary Examiner(s): Nguyen, Hung
• Application Number:
  US16/245,400
• Publication Number:
  US 20190250518A1
• Time in Patent Office: 515 Days
• Field of Search: 355 30, 355 53
• CPC Class Codes: G03F 7/70141 Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 7/70883 of optical system

Abstract

A lithographic projection apparatus is disclosed in which a space between the projection system and a sensor is filled with a liquid.

Claims

1. A support apparatus for a lithographic tool comprising a projection system adapted to project a patterned beam onto a target portion of a substrate, and a liquid supply system configured to at least partly fill a space between the projection system and an object on the support apparatus, with a liquid, the support apparatus comprising:

a body having a recess configured to support a substrate therein; and

a sensor capable of being positioned to be illuminated by radiation from above the body when the body and sensor is in the lithographic tool and once the radiation has passed through the liquid, a surface of a part of the sensor arranged to be essentially coplanar with a surface of, or on, the body and the sensor configured to detect the radiation.

2. The support apparatus of claim 1, wherein the sensor comprises a transmission image sensor configured to sense the radiation.

3. The support apparatus of claim 1, further comprising a port configured to drain liquid from the recess.

4. The support apparatus of claim 1, wherein the sensor comprises a spot or dose sensor, an integrated lens interferometer and scanner, an alignment mark, or any combination of the foregoing.

5. The support apparatus of claim 1, further comprising an edge member configured to at least partly surround an edge of the part of the sensor and having a primary surface arranged to face the projection system, the primary surface of the edge member configured to be substantially co-planar with a primary surface of the part of the sensor.

6. The support apparatus of claim 1, wherein the part of the sensor is configured to be in contact with the liquid and the radiation is configured to come from the projection system or an alignment system.

7. The support apparatus of claim 1, wherein the radiation is the patterned beam.

8. A substrate support for a lithographic apparatus comprising a projection system adapted to project a patterned beam onto a target portion of a substrate, and a liquid supply system configured to at least partly fill a space between the projection system and an object on the substrate support, with a liquid, the substrate support comprising:

a body having a support surface configured to support a substrate;

an edge member configured to surround an edge of the substrate, an object, or both, when positioned on the body, the edge member having a surface arranged to face toward the projection system and to be essentially coplanar with a surface of the substrate or the object; and

a port to drain liquid entering a gap between the edge member and the substrate, the object, or both, the port arranged to be positioned on a side of the gap opposite the projection system.

9. The support of claim 8, wherein the edge member is moveably mounted relative to the body.

10. The support of claim 8, wherein the body comprises a hydrophobic layer located lower than the edge member and/or lower than the substrate, the object, or both, when located on the body.

11. The support of claim 8, wherein the body comprises a plurality of protrusions configured to support the substrate and the port is provided below a plane defined by distal ends of the protrusions.

12. The support of claim 11, wherein the edge member forms a wall that surrounds the plurality of protrusions and surrounds a vacuum device configured to attract the substrate to the protrusions.

13. The support of claim 8, wherein the port is arranged in a groove surrounding the support surface.

14. An immersion lithographic projection apparatus comprising:

the support of claim 8;

a projection system configured to project a beam of radiation onto a substrate when supported on the support; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the support.

15. A substrate support for a lithographic apparatus comprising a projection system adapted to project a patterned beam onto a target portion of a substrate, and a liquid supply system configured to at least partly fill a space between the projection system and an object on the substrate support, with a liquid, the substrate support comprising:

a body having a support surface configured to support a substrate;

a port to drain liquid from the liquid supply system entering a gap between an edge of the body and the substrate, an object, or both, the port arranged to be positioned on a side of the gap opposite the projection system; and

a hydrophobic surface located lower than the gap and arranged to contact liquid entering the gap.

16. The support of claim 15, wherein the body has a surface that is arranged to face toward the projection system and to be essentially coplanar with a surface of the substrate, the object, or both.

17. The support of claim 15, wherein the body comprises a plurality of protrusions configured to support the substrate and the port is provided below a plane defined by distal ends of the protrusions.

18. The support of claim 17, wherein the edge member forms a wall that surrounds the plurality of protrusions and surrounds a vacuum device configured to attract the substrate to the protrusions.

19. The support of claim 15, wherein the port is located in a groove surrounding the support surface.

20. An immersion lithographic projection apparatus comprising:

the support of claim 15;

a projection system configured to project a beam of radiation onto a substrate when supported on the support; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the support.

21. A substrate support configured to hold a substrate for a projection system and a liquid supply system of a lithographic projection apparatus, the projection system configured to project a beam of radiation onto a target portion of the substrate and the liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space below the projection system and configured to confine the liquid to a localized area smaller than a surface of the substrate, the substrate support comprising:

an edge member moveable from a surface of the substrate support, the edge member configured to at least partly surround an edge of the substrate and an object positioned on the substrate support and to provide a primary surface arranged to face the projection system, the primary surface arranged to be essentially co-planar with a primary surface of the substrate and the object; and

an outlet configured to drain at least part of the liquid passing through a gap between the edge member and the substrate.

22. The substrate support of claim 21, further comprising a hydrophobic layer adjacent an edge portion of the edge member and the substrate, the object, or both, and arranged to be on an opposite side of the primary surface of the edge member and of the substrate, of the object, or both, to the projection system.

23. The substrate support of claim 22, wherein the liquid has a contact angle of greater than 90 °

with the hydrophobic layer.

24. The substrate support of claim 21, wherein the edge member has a projection with a top surface co-planar with the primary surface of the edge member and arranged to extend towards an optical axis of the lithographic projection apparatus.

25. The substrate support of claim 21, further comprising a member configured to span a gap and to abut or at least partly overlap, in the direction of an optical axis of the lithographic projection apparatus, the edge member.

26. The substrate support of claim 21, wherein the object comprises a sensor.

27. An immersion lithographic projection apparatus comprising:

the substrate support of claim 21;

a projection system configured to project a beam of radiation onto a substrate when supported on the substrate support; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the substrate support.

28. A movable table for a projection system and a liquid supply system of a lithographic projection apparatus, the projection system configured to project a radiation beam onto a target portion of a substrate and the liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space below the projection system and configured to confine the liquid to a localized area smaller than a surface of the substrate, the movable table comprising:

an edge member configured to at least partly surround an edge of an object, when on the table, and to provide a primary surface arranged to face the projection system, the primary surface arranged to be essentially co-planar with a primary surface of the object; and

an outlet configured to drain at least part of the liquid passing through a gap between the edge member and the object.

29. The table of claim 28, wherein the edge member is moveable from a surface of the table.

30. The table of claim 28, further comprising a hydrophobic surface located below the primary surfaces of the edge member and the object and arranged to contact liquid entering a gap between the edge member and the object.

31. The table of claim 28, Wherein the outlet comprises an opening to accept at least part of the liquid passing through the gap between the edge member and the object and defined in a surface arranged to face the projection system.

32. An immersion lithographic projection apparatus comprising:

the table of claim 28;

a projection system configured to project a beam of radiation onto a substrate; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the substrate.

33. A movable table for a lithographic projection apparatus comprising a projection system configured to project a radiation beam onto a target portion of a substrate and a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space below the projection system and configured to confine the liquid to a localized area smaller than a surface of the substrate, the movable table comprising:

an edge member configured to at least partly surround an edge of an object, when on the table, and to provide a primary surface arranged to face the projection system, the primary surface arranged to be essentially co-planar with a primary surface of the object; and

a hydrophobic surface located below the primary surfaces of the edge member and the object and arranged to contact liquid entering a gap between the edge member and the object.

34. The table of claim 33, wherein the edge member is moveable from a surface of the table.

35. The table of claim 33, further comprising an opening to accept at least part of the liquid passing through a gap between the edge member end the object, the opening defined in a surface arranged to face the projection system.

36. An immersion lithographic projection apparatus comprising:

the table of claim 33;

a projection system configured to project a beam of radiation onto a substrate; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the substrate.