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Inspecting apparatus

  • US 10,678,385 B2
  • Filed: 08/18/2017
  • Issued: 06/09/2020
  • Est. Priority Date: 01/27/2014
  • Status: Active Grant
First Claim
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1. An inspection apparatus comprising:

  • a holder configured to set an inspection target on a front side of the holder, the inspection target configured to detect a first change from a no-contact condition to a contact condition on the inspection target by a human finger and/or a second change from the contact condition to the no-contact condition on the inspection target by the human finger, wherein the front side of the holder extends in an X-Y plane defined by an X-axis and a Y-axis, and wherein a Z-axis is defined as perpendicular to the X-Y plane;

    one or more pseudo fingers, each configured be detected as the human finger by the inspection target, each of the one or more pseudo fingers being an elongated member;

    a memory configured to store a respective value of a pressing force in a range of pressing forces, said range including a zero pressing force value, for each of the one or more pseudo fingers;

    a positioner configured to linearly move at least one of the one or more pseudo fingers in a Z-axis direction, toward and/or away from the inspection target;

    a housing comprising a chamber for accommodating the one or more pseudo fingers so that an upper portion of each of the one or more pseudo fingers is within the housing, wherein the one or more pseudo fingers are configured to linearly move relative to the housing;

    a controller configured to regulate the pressing force for the at least one or more pseudo fingers by controlling the positioner based on the one or more respective values; and

    a sensor configured to acquire from the inspection target a first electric signal output indicating the first change and/or a second electrical signal output indicating the second change.

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