Devices and methods of forming low resistivity noble metal interconnect
First Claim
1. A structure comprising:
- a dielectric matrix;
a first via extending completely through the dielectric matrix;
a second via extending completely through the dielectric matrix;
a trench extending partially through the dielectric matrix, the trench arranged laterally between the first via and the second via;
a first interconnect in the first via;
a second interconnect in the second via;
a third interconnect in the trench;
a barrier layer including a first portion and a second portion lining each of the first via, the second via, and the trench,a first air-gap arranged laterally between the trench and the first via; and
a second air-gap arranged laterally between the trench and the second via,wherein the first portion of the barrier layer is an oxide, the second portion of the barrier layer is a metal, the first air-gap and the second air-gap are fully surrounded by respective portions of dielectric material, and the first interconnect, the second interconnect, and the third interconnect each comprise a noble metal.
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Accused Products
Abstract
Devices and methods of fabricating integrated circuit devices for forming low resistivity interconnects are provided. One method includes, for instance: obtaining an intermediate semiconductor interconnect device having a substrate, a cap layer, and a dielectric matrix including a set of trenches and a set of vias; depositing a barrier layer along a top surface of the semiconductor interconnect device; depositing and annealing a metal interconnect material over a top surface of the barrier layer, wherein the metal interconnect material fills the set of trenches and the set of vias; planarizing a top surface of the intermediate semiconductor interconnect device; exposing a portion of the barrier layer between the set of trenches and the set of vias; and depositing a dielectric cap. Also disclosed is an intermediate device formed by the method.
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Citations
12 Claims
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1. A structure comprising:
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a dielectric matrix; a first via extending completely through the dielectric matrix; a second via extending completely through the dielectric matrix; a trench extending partially through the dielectric matrix, the trench arranged laterally between the first via and the second via; a first interconnect in the first via; a second interconnect in the second via; a third interconnect in the trench; a barrier layer including a first portion and a second portion lining each of the first via, the second via, and the trench, a first air-gap arranged laterally between the trench and the first via; and a second air-gap arranged laterally between the trench and the second via, wherein the first portion of the barrier layer is an oxide, the second portion of the barrier layer is a metal, the first air-gap and the second air-gap are fully surrounded by respective portions of dielectric material, and the first interconnect, the second interconnect, and the third interconnect each comprise a noble metal. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A structure comprising:
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a dielectric matrix; a first via extending completely through the dielectric matrix; a second via extending completely through the dielectric matrix; a trench extending partially through the dielectric matrix, the trench arranged laterally between the first via and the second via; a first interconnect in the first via; a second interconnect in the second via; a third interconnect in the trench; a first air-gap arranged laterally between the trench and the first via; a second air-gap arranged laterally between the trench and the second via; and a barrier layer having respective portions lining the first via, the second via, and the trench, the respective portions of the barrier layer located in the first via, in the second via, and in the trench below respective portions of dielectric material wherein the respective portions of dielectric material directly contact the first interconnect, the second interconnect, and the third interconnect, the first air-gap and the second air-gap are fully surrounded by therespective portions of dielectric material, and the first interconnect, the second interconnect, and the third interconnect each comprise a noble metal. - View Dependent Claims (9, 10, 11, 12)
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Specification