Substrates comprising nano-patterning surfaces and methods of preparing thereof

• US 10,682,829 B2
• Filed: 12/17/2014
• Issued: 06/16/2020
• Est. Priority Date: 12/19/2013
• Status: Active Grant

• Current Assignee: Illumina Incorporated
• Original Assignee: Illumina Incorporated
• Inventors: Bowen, M. Shane, Venkatesan, Bala Murali, Barnard, Steven M.
• Primary Examiner(s): Yang, Z. Jim
• Application Number:
  US15/025,866
• Publication Number:
  US 20160246170A1
• Time in Patent Office: 2,008 Days
• CPC Class Codes: B29C 59/005 characterised by the choice of material
• CPC Class Codes: B29C 59/022 characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
• CPC Class Codes: B29K 2077/00 Use of PA, i.e. polyamides, e.g. polyesteramides or derivatives thereof, as moulding material
• CPC Class Codes: B29K 2105/0085 Copolymers
• CPC Class Codes: B32B 3/266 characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
• CPC Class Codes: B32B 3/30 characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs apertured layer B32B3/266; layer with cavities or internal voids B32B3/26
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 2201/05 Microfluidics
• CPC Class Codes: B81B 2203/03 Static structures
• CPC Class Codes: B81B 2203/0315 Cavities
• CPC Class Codes: B81B 2203/0323 Grooves
• CPC Class Codes: B81B 2203/0361 Tips, pillars
• CPC Class Codes: C08G 69/00 Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule products obtained from isocyanates or isothiocyanates C08G18/00; polyamide-imides C08G73/14
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

Substrates comprising a functionalizable layer, a polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof, and a backing layer and the preparation thereof by using room-temperature UV nano-embossing processes are disclosed. The substrates can be prepared by a roll-to-roll continuous process. The substrates can be used as flow cells, nanofluidic or microfluidic devices for biological molecules analysis.

Claims

1. A substrate comprising:

a functionalizable layer;

a UV-cured polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof; and

a backing layer;

wherein the micro-scale or nano-scale patterns of the UV-cured polymer layer comprise channels, trenches, wells, posts, or combinations thereof;

wherein the functionalizable layer comprises a reaction product of a functionalizable polymer and a layer of condensed norbornene silane, wherein the functionalizable polymer comprises one or more functional groups selected from the group consisting of azide, optionally substituted alkene, optionally substituted hydrazone, optionally substituted tetrazole, optionally substituted tetrazine and thiol; and

wherein the UV-cured polymer layer comprises at least one photocurable polymer and is free of photoresist.

2. The substrate of claim 1, wherein the functionalizable layer is disposed between the backing layer and the UV-cured polymer layer.

3. The substrate of claim 2, wherein at least a portion of the UV-cured polymer layer is perforated to expose the underlying functionalizable layer in micro-scale or nano-scale patterns.

4. The substrate of claim 1, wherein the UV-cured polymer layer is disposed between the backing layer and the functionalizable layer.

5. The substrate of claim 4, wherein the functionalizable layer comprises a plurality of micro-scale or nano-scale patterns, or combinations thereof, wherein at least a portion of the functionalizable layer is perforated to expose the underlying UV-cured polymer layer in micro-scale or nano-scale patterns.

6. The substrate of claim 1, wherein the substrate further comprises a sealing layer to substantially seal the UV-cured polymer layer and the functionalizable layer between the backing layer and said sealing layer.

7. The substrate of claim 1, wherein at least one of the micro-scale or nano-scale patterns is capable of admitting a sample fluid.

8. The substrate of claim 1, wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

9. The substrate of claim 1, wherein the functionalizable layer is covalently attached to biomolecules selected from the group consisting of amino acids, nucleosides, nucleotides, peptides, oligonucleotides, polynucleotides, nucleic acids, and proteins, and combinations thereof via reaction of the one or more functional groups with the biomolecules.

10. The substrate of claim 9, wherein the biomolecules are polynucleotides or nucleic acids.

11. The substrate of claim 1, wherein the photocurable polymer comprises a urethane, an acrylate, a silicone, an epoxy, a polyacrylic acid, a polyacrylate, an epoxysilicone, an epoxy resin, polydimethylsiloxane (PDMS), a silsesquioxane, an acyloxysilane, a maleate polyester, a vinyl ether, or a monomer with vinyl or ethynyl groups, or a copolymer or a combination thereof.

12. The substrate of claim 1, wherein each of the backing layer, the functionalizable layer, and the UV-cured polymer layer is no more than about 1 mm in thickness.

13. The substrate of claim 1, wherein at least one of the backing layer, the UV-cured polymer layer, or the functionalizable layer is further doped with a dopant material selected from the group consisting of nanoparticles, Q dots, binding receptors, ligands, nucleic acids, reactive moieties in the functionalizable layer, optical filter materials, lighter absorbing materials, light emitting materials, light scattering materials, electrical conductive materials, and thermally conductive materials, and combinations thereof.

14. The substrate of claim 1, wherein the one or more functional groups are azide.

15. The substrate of claim 3, wherein the functionalizable layer comprises a plurality of micro-scale or nano-scale patterns, or combinations thereof, and at least a portion of the UV-cured polymer and functionalizable layers is perforated to expose the underlying backing layer in micro-scale or nanoscale patterns.

16. The substrate of claim 5, wherein at least a portion of the functionalizable and the UV-cured polymer layers is perforated to expose the underlying backing layer in micro-scale or nano-scale patterns.

17. The substrate of claim 5, wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

18. The substrate of claim 1, wherein at least a portion of the micro-scale or nano-scale patterns are posts, and wherein the posts have an average diameter or an average height of less than about 500 nm.

19. A substrate comprising:

a functionalizable layer;

a UV-cured polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof; and

a backing layer;

wherein the UV-cured polymer layer comprises at least one photocurable polymer;

wherein the functionalizable layer comprises a reaction product of a condensed norbornen silane and a functionalizable polymer, wherein the functionalizable polymer comprises one or more functional groups capable of attaching to biomolecules, and wherein the functionalizable polymer comprises Formula (Ia);

20. The substrate of claim 19, wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

21. The substrate of claim 19, wherein UV-cured polymer layer comprises a polyurethane, an acrylate, a silicone, an epoxy, a polyacrylic acid, a polyacrylate, an epoxysilicone, an epoxy resin, polydimethylsiloxane (PDMS), a silsesquioxane, an acyloxysilane, a maleate polyester, a vinyl ether, or a monomer with vinyl or ethynyl groups, or a copolymer or a combination thereof.

22. The substrate of claim 19, wherein at least a portion of the micro-scale or nano-scale patterns are posts, and wherein the posts have an average diameter or an average height of less than about 500 nm.

23. The substrate of claim 19, further comprises a sealing layer to substantially seal the UV-cured polymer layer and the functionalizable layer between the backing layer and the sealing layer.