Gas supply manifold and method of supplying gases to chamber using same

• US 10,683,571 B2
• Filed: 02/25/2014
• Issued: 06/16/2020
• Est. Priority Date: 02/25/2014
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Jdira, Lucian C., Terhorst, Herbert, Halpin, Michael, White, Carl, Dunn, Todd Robert, Shero, Eric, Verbass, Melvin, Wuester, Christopher, Fondurulia, Kyle
• Primary Examiner(s): Lund, Jeffrie R
• Assistant Examiner(s): Antolin, Stanislav
• Application Number:
  US14/188,760
• Publication Number:
  US 20150240359A1
• Time in Patent Office: 2,303 Days
• CPC Class Codes: C23C 16/45512 Premixing before introduction in the reaction chamber
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: C23C 16/45582 Expansion of gas before it reaches the substrate
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence

Abstract

A gas inlet system for a wafer processing reactor includes a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor; and gas feeds including a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit. Each feed has two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit, and the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position.

Claims

1. A gas inlet system in combination with a wafer processing reactor, comprising:

a wafer processing reactor having a reaction chamber and a showerhead disposed inside the reaction chamber,

a tubular gas manifold conduit having;

a lower end connected to a gas inlet port of the reaction chamber, the gas inlet port being upstream of the reaction chamber of the wafer processing reactor for supplying a gas mixed in the tubular gas manifold conduit to the showerhead,

a first axial position being upstream of the lower end,

a downstream position being downstream of the first axial position and upstream of the lower end, the downstream position having a first diameter and the first axial position having a second diameter, the second diameter being smaller than the first diameter, and

gas feeds comprising;

a first feed for feeding a first gas into the tubular gas manifold conduit to the downstream position and

a second feed for feeding a second gas, which is different from the first gas, into the tubular gas manifold conduit to the downstream position, the first and the second feeds each having two or more injection ports attached to the tubular gas manifold conduit at the first axial position of the tubular gas manifold conduit such that the first gas and the second gas are separately fed into the tubular gas manifold conduit at the first axial position,

wherein the injection ports of the first feed and the injection ports of the second feed are evenly distributed along the circumference of the second diameter and coplanar with the second diameter at the first axial position, and

wherein the injection ports of the first feed and the injection ports of the second feed open into the tubular gas manifold conduit at the first axial position to feed the first and second gases to the downstream position.

2. The gas inlet system according to claim 1, wherein the number of the injection ports of the first feed and the number of the injection ports of the second feed are the same, and the injection ports of the first feed and the injection ports of the second feed are disposed alternately along the circumference of the tubular gas manifold conduit.

3. The gas inlet system according to claim 1, wherein the first feed further includes a C-shaped common channel having an inlet for inflow of the first gas and multiple outlets for outflow of the first gas connected to the two or more injection ports of the first feed, respectively, and the second feed further includes a C-shaped common channel having an inlet for inflow of the second gas and multiple outlets for outflow of the second gas connected to the two or more injection ports of the second feed, respectively.

4. The gas inlet system according to claim 1, wherein the injection ports of each of the first and second gas feeds are connected to the tubular gas manifold conduit at an angle of about 0°

to about 45°

relative to the vertical longitudinal axis of the tubular gas manifold conduit.

5. The gas inlet system according to claim 1, wherein the injection ports of each of the first and second gas feeds are connected to the tubular gas manifold conduit at an angle of about 90°

relative to the vertical longitudinal axis of the tubular gas manifold conduit.

6. The gas inlet system according to claim 1, wherein the first feed is connected to a gas source providing a reactive gas, and the second feed is connected to a gas source providing an inert gas.

7. The gas inlet system according to claim 1, the tubular gas manifold conduit further having

a second axial position being upstream of the first axial position, the second axial position having a third diameter, the third diameter being smaller than the second diameter,

wherein the first and second gas feeds serve as lower gas feeds, and the gas inlet system further comprises upper gas feeds, the upper gas feeds comprising

a third feed for feeding a third gas into the tubular gas manifold conduit to the first axial position and

a fourth feed for feeding a fourth gas into the tubular gas manifold conduit to the first axial position,

each of the third and fourth gas feeds having two or more injection ports connected to the tubular gas manifold conduit at the second axial position of the tubular gas manifold conduit,

wherein the injection ports of the third feed and the injection ports of the fourth feed are evenly distributed along the circumference of the third diameter and coplanar with the third diameter at the second axial position, and

wherein the injection ports of the third feed and the injection ports of the fourth feed open into the tubular gas manifold conduit at the second axial position to feed the third and fourth gases to the first axial position.

8. The gas inlet system according to claim 7, wherein the third diameter is smaller than the first diameter.

9. The gas inlet system according to claim 7, wherein the third feed further includes a C-shaped common channel having an inlet for inflow of the third gas and multiple outlets for outflow of the third gas connected to the two or more injection ports of the third feed, respectively, and the fourth feed further includes a C-shaped common channel having an inlet for inflow of the fourth gas and multiple outlets for outflow of the fourth gas connected to the two or more injection ports of the fourth feed, respectively.

10. The gas inlet system according to claim 7, wherein the injection ports of each of the third and fourth feeds are connected to the tubular gas manifold conduit at an angle of about 0°

to about 45°

relative to the vertical longitudinal axis of the tubular gas manifold conduit.

11. The gas inlet system according to claim 10, wherein the injection ports of each of the third and fourth feeds are connected to the tubular gas manifold conduit approximately in parallel to the vertical longitudinal axis of the tubular gas manifold conduit, and the injection ports of each of the first and second feeds are connected to the tubular gas manifold conduit at an angle of about 15°

to about 25°

relative to the vertical longitudinal axis of the tubular gas manifold conduit.

12. The gas inlet system according to claim 11, wherein the top feed is connected to a gas source providing a dry gas.

13. The gas inlet system according to claim 1, the tubular gas manifold conduit further having:

an upstream end being upstream of the second axial position, the upstream end having a fourth diameter, the fourth diameter being smaller than the third diameter, and

the gas inlet system further comprises

a top feed for feeding an auxiliary gas into the tubular gas manifold conduit to the second axial position, the top feed having an injection port connected to the tubular gas manifold conduit at the upstream end of the tubular gas manifold conduit.

14. The gas inlet system according to claim 1, wherein the wafer processing reactor is a reactor for atomic layer deposition (ALD) or a reactor for chemical vapor deposition (CVD), and the tubular gas manifold conduit is connected to the gas inlet port of the reactor for ALD or CVD.

15. The gas inlet system according to claim 14, wherein the tubular gas manifold conduit is adapted to be the gas inlet port disposed centrally above a wafer accommodation area of the wafer processing reactor.

16. The gas inlet system and processing reactor combination of claim 1, wherein the first axial position of the tubular gas manifold conduit is spaced away from the inlet port of the processing reactor by a distance of more than 56 mm.

17. A method for feeding a mixed gas to a wafer processing reactor using the gas inlet system of claim 1, comprising:

feeding the first gas to the tubular gas manifold conduit through the injection ports of the first feed, while feeding the second gas to the tubular gas manifold conduit through the injection ports of the second feed, whereby the first gas and the second gas are mixed inside the tubular gas manifold conduit; and

feeding the mixed gas to the wafer processing reactor through the gas inlet system to deposit a film on a substrate loaded in the reactor.

18. The method according to claim 17, wherein the gas feeds serve as lower gas feeds, and the gas inlet system further comprises upper gas feeds which comprise a third feed and a fourth feed, each of the upper gas feeds having two or more injection ports connected to the tubular gas manifold conduit at a second axial position of the tubular gas manifold conduit, which second axial position is positioned upstream of the first axial position, wherein the method further comprises feeding a third gas and a fourth gas to the tubular gas manifold conduit through the injection ports of the third feed and the fourth feed, respectively, while feeding to the tubular gas manifold conduit the first and second gases, one of which first and second gases is a process gas.

19. The method according to claim 17, wherein the tubular gas manifold conduit further comprises a top feed having an injection port connected to the tubular gas manifold conduit at an upstream end of the tubular gas manifold conduit, wherein the method further comprises feeding an inert gas to the tubular gas manifold conduit through the injection port of the top feed while feeding to the tubular gas manifold conduit the first and second gases, one of which is a process gas.

20. The method according to claim 19, wherein the film is deposited under first conditions, and the method further comprises changing a flow rate of the inert gas from the top feed while maintaining the first conditions except for the flow rate of the inert gas, so as to deposit a film on a substrate having an improved uniformity of film relative to a uniformity of the film deposited under the first conditions.