Chalcogenide glass waveguides for refractive non-mechanical beam steerer

• US 10,690,992 B2
• Filed: 04/05/2018
• Issued: 06/23/2020
• Est. Priority Date: 04/05/2017
• Status: Active Grant

• Current Assignee: The Government Of The United States As Represented By The Secretary Of The Navy
• Original Assignee: The Government Of The United States Of America, As Represented By The Secretary Of The Navy
• Inventors: Frantz, Jesse A., Myers, Jason D., Bekele, Robel Y., Spillmann, Christopher M., Naciri, Jawad, Kolacz, Jakub, Gotjen, Henry G., Auxier, Jason, Shaw, Leslie Brandon, Sanghera, Jasbinder S.
• Primary Examiner(s): Lau, Edmond C
• Application Number:
  US15/946,011
• Publication Number:
  US 20180292726A1
• Time in Patent Office: 810 Days
• CPC Class Codes: C03C 13/043 Chalcogenide glass compositions
• CPC Class Codes: C03C 3/321 Chalcogenide glasses, e.g. containing S, Se, Te
• CPC Class Codes: G02F 1/0018 Electro-optical materials
• CPC Class Codes: G02F 1/011 in optical waveguides, not otherwise provided for in this subclass
• CPC Class Codes: G02F 1/0113 Glass-based, e.g. silica-based, optical waveguides
• CPC Class Codes: G02F 1/1326 Liquid crystal optical waveguides or liquid crystal cells specially adapted for gating or modulating between optical waveguides
• CPC Class Codes: G02F 1/1337 Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/292 by controlled diffraction or phased-array beam steering controlled diffraction for optical switching G02F1/31
• CPC Class Codes: G02F 1/2955 by controlled diffraction or phased-array beam steering controlled diffraction for optical waveguide switching G02F1/313
• CPC Class Codes: G02F 2203/24 beam steering

Abstract

A method for making a chalcogenide glass waveguide in a liquid crystal-based non-mechanical beam steering device that permits steering in the mid-wave infrared. The waveguide core, the subcladding, or both comprise a chalcogenide glass. A mask is used to produce a tapered subcladding. Also disclosed is the related non-mechanical beam steering device that includes a chalcogenide waveguide.

Claims

1. A method for making a chalcogenide glass waveguide for use in a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the wave aide core has a higher refractive index than the tapered subcladding;

wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass; and

wherein one or more obstructions are placed between the substrate and the mask.

2. The method of claim 1, wherein the substrate comprises Si.

3. The method of claim 1, wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF₂, silicate glass, germinate glass, fluoride glass, MgF₂ glass, or any combination thereof.

4. The method of claim 1, wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

5. A method for making a chalcogenide glass waveguide for use in a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding;

wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass; and

wherein more than one mask is used.

6. The method of claim 5, wherein the substrate comprises Si.

7. The method of claim 5, wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF₂, silicate glass, germinate glass, fluoride glass, MgF₂ glass, or any combination thereof.

8. The method of claim 5, wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

9. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein the liquid crystal layer comprises an organic material that is transparent in the midwave infrared.

10. The method of claim 9, wherein the substrate comprises Si.

11. The method of claim 9, wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF₂, silicate glass, germinate glass, fluoride glass, MgF₂ glass, or any combination thereof.

12. The method of claim 9, wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

13. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein one or more obstructions are placed between the substrate and the mask.

14. The method of claim 13, wherein the substrate comprises Si.

15. The method of claim 13, wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF₂, silicate glass, germinate glass, fluoride glass, MgF₂ glass, or any combination thereof.

16. The method of claim 13, wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.

17. A method for making a liquid crystal non-mechanical beam steering device, comprising:

depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

depositing a waveguide core on the tapered subcladding, wherein the waveguide core has a higher refractive index than the tapered subcladding, and wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass;

depositing a liquid crystal layer on the waveguide core; and

placing a glass plate patterned with top electrodes on the liquid crystal layer;

wherein more than one mask is used.

18. The method of claim 17, wherein the substrate comprises Si.

19. The method of claim 17, wherein the waveguide core comprises a chalcogenide glass and the subcladding comprises CaF₂, silicate glass, germinate glass, fluoride glass, MgF₂ glass, or any combination thereof.

20. The method of claim 17, wherein the tapered subcladding has a taper angle between 0.1 and 20 milliradians.