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Chalcogenide glass waveguides for refractive non-mechanical beam steerer

  • US 10,690,992 B2
  • Filed: 04/05/2018
  • Issued: 06/23/2020
  • Est. Priority Date: 04/05/2017
  • Status: Active Grant
First Claim
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1. A method for making a chalcogenide glass waveguide for use in a liquid crystal non-mechanical beam steering device, comprising:

  • depositing a tapered subcladding on a substrate using a mask with a central opening, wherein the tapered subcladding has a film thickness profile exhibiting full thickness beyond the central opening of the mask, an S-shaped taper near the edge of the mask, and no film in areas completely shielded by the mask; and

    depositing a waveguide core on the tapered subcladding, wherein the wave aide core has a higher refractive index than the tapered subcladding;

    wherein the tapered subcladding, waveguide core, or both comprise a chalcogenide glass; and

    wherein one or more obstructions are placed between the substrate and the mask.

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