Radiation shield

• US 10,692,741 B2
• Filed: 08/08/2017
• Issued: 06/23/2020
• Est. Priority Date: 08/08/2017
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holdings B.V.
• Inventors: Verbaas, Melvin
• Primary Examiner(s): Qi, Hua
• Application Number:
  US15/672,119
• Publication Number:
  US 20190051544A1
• Time in Patent Office: 1,050 Days
• Field of Search: None
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: C23C 16/481 by radiant heating of the substrate
• CPC Class Codes: C23C 16/488 Protection of windows for introduction of radiation into the coating chamber
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67248 Temperature monitoring
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.

Claims

1. A radiation shield for use in a reactor, the radiation shield comprising:

a plate comprising a first section and a second section, wherein the first section comprises an annular disc having an inner perimeter and an outer perimeter, and wherein the second section comprising a hollow frusto shape; and

an attachment device engaged with the plate, wherein the attachment device is configured to removably couple the plate to a side surface of a susceptor within a reaction chamber of the reactor;

wherein;

the attachment device is mounted to and directly engages the second section of the plate; and

the attachment device comprises a slidable member configured to slide along the second section of the plate.

2. The radiation shield of claim 1, wherein the inner perimeter does not contact the susceptor.

3. The radiation shield of claim 1, wherein the slidable member comprises a recess to receive a threaded fastener.

4. The radiation shield of claim 1, wherein the slidable member comprises a recess to receive an alignment pin.

5. The radiation shield of claim 1, wherein the slidable member comprises a first end, a second end, a block, and a fastener, wherein the first end is configured to engage the side surface of the susceptor heater assembly, the second end is retained in sliding engagement against a top surface of the plate by the fastener, the fastener is secured to the block, and the block is engaged against a bottom surface opposite the top surface of the plate.

6. The radiation shield of claim 1, further comprising one or more threaded fasteners to attach the slidable member to the plate.

7. The radiation shield of claim 6, wherein the attachment device comprises rivets to receive at least one of the one or more threaded fasteners.

8. The radiation shield of claim 6, wherein the attachment device comprises a block to receive at least one of the one or more threaded fasteners.

9. The radiation shield of claim 8, wherein the block comprises an alignment pin.

10. The radiation shield of claim 1, further comprising an alignment pin to align the attachment device relative to the susceptor.

11. An apparatus for supporting a substrate during a reaction process, the apparatus comprising:

a susceptor heater assembly comprising a base comprising a bottom surface and a side surface;

a radiation shield attached to the side surface, wherein the radiation shield comprises;

a plate comprising a first section and a second section, wherein the first section comprises an annular disc having an inner perimeter and an outer perimeter, and wherein the second section comprising a hollow frusto shape; and

an attachment device mounted to the second section of the plate of the radiation shield, the attachment device removably extending between the second section of the plate of the radiation shield and the side surface of the base of the susceptor heater assembly;

wherein the attachment device is configured to removably retain the radiation shield a distance away from the bottom surface and the side surface of the base of the susceptor heater assembly such that a gap is defined between the radiation shield and the base of the susceptor heater assembly.

12. The apparatus of claim 11, further comprising one or more lift pins, wherein the one or more lift pins are received within a space of the plate defined by the inner perimeter and are received within the susceptor heater assembly.

13. The apparatus of claim 11, further comprising a cap on a top surface of the base.

14. The apparatus of claim 11, wherein the side surface comprises a ledge, and wherein the attachment device is engaged with and rests on the ledge.

15. The radiation shield of claim 11, wherein the attachment device comprises a slidable member.

16. The radiation shield of claim 15, wherein the slidable member comprises a first end coupled to the plate and a second end configured to couple to the side surface.