Corner spoiler for improving profile uniformity

• US 10,697,063 B2
• Filed: 01/30/2015
• Issued: 06/30/2020
• Est. Priority Date: 01/30/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Zhao, Lai, Furuta, Gaku, Wang, Qunhua, Tiner, Robin L., Park, Beom Soo, Choi, Soo Young, Yadav, Sanjay D.
• Primary Examiner(s): Chen, Keath T
• Application Number:
  US14/610,489
• Publication Number:
  US 20150211120A1
• Time in Patent Office: 1,978 Days
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32651 Shields, e.g. dark space shields, Faraday shields

Abstract

The present disclosure relates to a corner spoiler designed to decrease high deposition rates on corner regions of substrates by changing the gas flow. In one embodiment, a corner spoiler for a processing chamber includes an L-shaped body fabricated from a dielectric material, wherein the L-shaped body is configured to change plasma distribution at a corner of a substrate in the processing chamber. The L-shaped body includes a first and second leg, wherein the first and second legs meet at an inside corner of the L-shaped body. The length of the first or second leg is twice the distance defined between the first or second leg and the inside corner. In another embodiment, a shadow frame for a depositing chamber includes a rectangular shaped body having a rectangular opening therethrough, and one or more corner spoilers coupled to the rectangular shaped body at corners of the rectangular shaped body.

Claims

1. A shadow frame for a processing chamber comprising:

a rectangular shaped body having a rectangular opening therethrough, an inside edge and an outside edge; and

one or more corner spoilers coupled to a top surface of the rectangular shaped body at one or more corners of the rectangular shaped body and disposed within an area bounded by the inside edge and the outside edge of the rectangular shaped body, wherein the one or more corner spoilers comprises;

an L-shaped body fabricated from a dielectric material, wherein the L-shaped body is configured to change plasma distribution at a corner of a substrate in the processing chamber, and wherein the L-shaped body comprises;

a first leg has an end with an inside corner and an outside corner; and

a second leg has an end with an inside corner and an outside corner, wherein the first and second legs meet at an inside corner and an outside corner of the L-shaped body.

2. The shadow frame of claim 1, wherein a horizontal distance between an inside edge of the first and second legs and the inside edge of the rectangular shaped body is between about 2 mm and about 15 mm.

3. A processing chamber, comprising:

a substrate support disposed within the processing chamber, the substrate support having a substrate-receiving surface configured to support a substrate;

a shadow frame disposed over a periphery of the substrate, the shadow frame having a rectangular shaped body having a rectangular opening therethrough, an inside edge and an outside edge; and

one or more corner spoilers coupled to a top surface of the rectangular shaped body at one or more corners of the rectangular shaped body and disposed within an area bounded by the inside edge and the outside edge of the rectangular shaped body, each corner spoiler comprising;

an L-shaped body fabricated from a dielectric material, wherein the L-shaped body is further configured to change plasma distribution at a corner of a substrate in the processing chamber, and wherein the L-shaped body comprises;

a first leg has an end with an inside corner and an outside corner; and

a second leg has an end with an inside corner and an outside corner,

wherein the first and second legs meet at an inside corner and an outside corner of the L-shaped body, and wherein a distance between the inside corner and the outside corner of the end of the first leg is between about 35 mm and 55 mm and a distance between the inside corner and the outside corner of the end of the second leg is between about 35 mm and 55 mm.

4. The processing chamber of claim 3, wherein the dielectric material consists essentially of aluminum oxide or polytetrafluoroethylene.

5. The processing chamber of claim 3, wherein the one or more corner spoilers has a uniform thickness between about 3 mm and about 9 mm.

6. The processing chamber of claim 3, wherein a horizontal distance between an inside edge of the first and second legs and the inside edge of the rectangular shaped body is between about 2 mm and about 15 mm.

7. The processing chamber of claim 6, wherein the shadow frame comprises aluminum oxide or polytetrafluoroethylene.

8. The processing chamber of claim 3, further comprising:

a diffuser disposed opposite the substrate.

9. The processing chamber of claim 8, wherein the diffuser comprises a center region having a first thickness and a peripheral region having a second thickness, wherein the first thickness is less than the second thickness.

10. The processing chamber of claim 8, wherein the distance between the diffuser and the substrate is between about 400 mm and about 1200 mm.