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Array substrate and fabricating method thereof

  • US 10,700,097 B2
  • Filed: 02/28/2017
  • Issued: 06/30/2020
  • Est. Priority Date: 07/18/2016
  • Status: Active Grant
First Claim
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1. An array substrate having a display area and a peripheral area, comprising:

  • a base substrate;

    a plurality of first thin film transistors on the base substrate and respectively in a plurality of subpixels in the display area; and

    a plurality of second thin film transistors on the base substrate and in the peripheral area;

    wherein an oxygen content in active layers of the plurality of first thin film transistors is higher than that in active layers of the plurality of second thin film transistors;

    a respective one of the plurality of first thin film transistors has a substantially uniform oxygen content across an entirety of a surface of an active layer of the respective one of the plurality of first thin film transistors away from the base substrate; and

    a respective one of the plurality of second thin film transistors has a substantially uniform oxygen content across an entirety of a surface of an active layer of the respective one of the plurality of second thin film transistors away from the base substrate.

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